JPS5117376B2 - - Google Patents

Info

Publication number
JPS5117376B2
JPS5117376B2 JP8899371A JP8899371A JPS5117376B2 JP S5117376 B2 JPS5117376 B2 JP S5117376B2 JP 8899371 A JP8899371 A JP 8899371A JP 8899371 A JP8899371 A JP 8899371A JP S5117376 B2 JPS5117376 B2 JP S5117376B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP8899371A
Other languages
Japanese (ja)
Other versions
JPS4854868A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8899371A priority Critical patent/JPS5117376B2/ja
Publication of JPS4854868A publication Critical patent/JPS4854868A/ja
Publication of JPS5117376B2 publication Critical patent/JPS5117376B2/ja
Expired legal-status Critical Current

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Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP8899371A 1971-11-10 1971-11-10 Expired JPS5117376B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8899371A JPS5117376B2 (enrdf_load_stackoverflow) 1971-11-10 1971-11-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8899371A JPS5117376B2 (enrdf_load_stackoverflow) 1971-11-10 1971-11-10

Publications (2)

Publication Number Publication Date
JPS4854868A JPS4854868A (enrdf_load_stackoverflow) 1973-08-01
JPS5117376B2 true JPS5117376B2 (enrdf_load_stackoverflow) 1976-06-02

Family

ID=13958321

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8899371A Expired JPS5117376B2 (enrdf_load_stackoverflow) 1971-11-10 1971-11-10

Country Status (1)

Country Link
JP (1) JPS5117376B2 (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5115584A (ja) * 1974-07-29 1976-02-07 Tokunao Narumi Kasoro
JPS5118477U (enrdf_load_stackoverflow) * 1974-07-29 1976-02-10
JPS52131877U (enrdf_load_stackoverflow) * 1976-04-01 1977-10-06
JPS54105868A (en) * 1979-01-16 1979-08-20 Tokunao Narumi Crematory
JPS55150228U (enrdf_load_stackoverflow) * 1979-04-17 1980-10-29

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5420117B2 (enrdf_load_stackoverflow) * 1973-09-21 1979-07-20
JPS5837137U (ja) * 1981-09-04 1983-03-10 株式会社日立国際電気 半導体基板保持治具
JPS5866325A (ja) * 1981-10-15 1983-04-20 Toshiba Ceramics Co Ltd エピタキシヤル成長用サセプタ−
JPS6077971A (ja) * 1983-10-06 1985-05-02 Ulvac Corp 化学反応を利用した縦型インラインプロセス装置
JPS6223983A (ja) * 1985-07-25 1987-01-31 Anelva Corp 真空化学反応装置
JP7160421B1 (ja) * 2022-02-10 2022-10-25 株式会社シー・ヴィ・リサーチ 成膜装置、成膜方法及びガスノズル

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5115584A (ja) * 1974-07-29 1976-02-07 Tokunao Narumi Kasoro
JPS5118477U (enrdf_load_stackoverflow) * 1974-07-29 1976-02-10
JPS52131877U (enrdf_load_stackoverflow) * 1976-04-01 1977-10-06
JPS54105868A (en) * 1979-01-16 1979-08-20 Tokunao Narumi Crematory
JPS55150228U (enrdf_load_stackoverflow) * 1979-04-17 1980-10-29

Also Published As

Publication number Publication date
JPS4854868A (enrdf_load_stackoverflow) 1973-08-01

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