JPS5117147B2 - - Google Patents
Info
- Publication number
- JPS5117147B2 JPS5117147B2 JP47003066A JP306672A JPS5117147B2 JP S5117147 B2 JPS5117147 B2 JP S5117147B2 JP 47003066 A JP47003066 A JP 47003066A JP 306672 A JP306672 A JP 306672A JP S5117147 B2 JPS5117147 B2 JP S5117147B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47003066A JPS5117147B2 (ko) | 1971-12-29 | 1971-12-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47003066A JPS5117147B2 (ko) | 1971-12-29 | 1971-12-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4872082A JPS4872082A (ko) | 1973-09-28 |
| JPS5117147B2 true JPS5117147B2 (ko) | 1976-05-31 |
Family
ID=11546943
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47003066A Expired JPS5117147B2 (ko) | 1971-12-29 | 1971-12-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5117147B2 (ko) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3596502B2 (ja) | 2001-09-25 | 2004-12-02 | セイコーエプソン株式会社 | マスク及びその製造方法、エレクトロルミネッセンス装置及びその製造方法並びに電子機器 |
-
1971
- 1971-12-29 JP JP47003066A patent/JPS5117147B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4872082A (ko) | 1973-09-28 |