JPS5116928B2 - - Google Patents
Info
- Publication number
- JPS5116928B2 JPS5116928B2 JP5834272A JP5834272A JPS5116928B2 JP S5116928 B2 JPS5116928 B2 JP S5116928B2 JP 5834272 A JP5834272 A JP 5834272A JP 5834272 A JP5834272 A JP 5834272A JP S5116928 B2 JPS5116928 B2 JP S5116928B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5834272A JPS5116928B2 (en) | 1972-06-12 | 1972-06-12 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5834272A JPS5116928B2 (en) | 1972-06-12 | 1972-06-12 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS4919028A JPS4919028A (en) | 1974-02-20 |
JPS5116928B2 true JPS5116928B2 (en) | 1976-05-28 |
Family
ID=13081632
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5834272A Expired JPS5116928B2 (en) | 1972-06-12 | 1972-06-12 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5116928B2 (en) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5544771A (en) * | 1978-09-26 | 1980-03-29 | Fujitsu Ltd | Manufacture of semiconductor |
JPS60210831A (en) * | 1984-04-04 | 1985-10-23 | Agency Of Ind Science & Technol | Manufacture of compound semiconductor crystal substrate |
JPS60210832A (en) * | 1984-04-04 | 1985-10-23 | Agency Of Ind Science & Technol | Manufacture of compound semiconductor crystal substrate |
JPS63133615A (en) * | 1986-11-26 | 1988-06-06 | Fujitsu Ltd | Vapor growth method |
FR2912552B1 (en) * | 2007-02-14 | 2009-05-22 | Soitec Silicon On Insulator | MULTILAYER STRUCTURE AND METHOD FOR MANUFACTURING THE SAME |
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1972
- 1972-06-12 JP JP5834272A patent/JPS5116928B2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS4919028A (en) | 1974-02-20 |