JPS5116928B2 - - Google Patents

Info

Publication number
JPS5116928B2
JPS5116928B2 JP5834272A JP5834272A JPS5116928B2 JP S5116928 B2 JPS5116928 B2 JP S5116928B2 JP 5834272 A JP5834272 A JP 5834272A JP 5834272 A JP5834272 A JP 5834272A JP S5116928 B2 JPS5116928 B2 JP S5116928B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5834272A
Other languages
Japanese (ja)
Other versions
JPS4919028A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5834272A priority Critical patent/JPS5116928B2/ja
Publication of JPS4919028A publication Critical patent/JPS4919028A/ja
Publication of JPS5116928B2 publication Critical patent/JPS5116928B2/ja
Expired legal-status Critical Current

Links

JP5834272A 1972-06-12 1972-06-12 Expired JPS5116928B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5834272A JPS5116928B2 (en) 1972-06-12 1972-06-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5834272A JPS5116928B2 (en) 1972-06-12 1972-06-12

Publications (2)

Publication Number Publication Date
JPS4919028A JPS4919028A (en) 1974-02-20
JPS5116928B2 true JPS5116928B2 (en) 1976-05-28

Family

ID=13081632

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5834272A Expired JPS5116928B2 (en) 1972-06-12 1972-06-12

Country Status (1)

Country Link
JP (1) JPS5116928B2 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5544771A (en) * 1978-09-26 1980-03-29 Fujitsu Ltd Manufacture of semiconductor
JPS60210831A (en) * 1984-04-04 1985-10-23 Agency Of Ind Science & Technol Manufacture of compound semiconductor crystal substrate
JPS60210832A (en) * 1984-04-04 1985-10-23 Agency Of Ind Science & Technol Manufacture of compound semiconductor crystal substrate
JPS63133615A (en) * 1986-11-26 1988-06-06 Fujitsu Ltd Vapor growth method
FR2912552B1 (en) * 2007-02-14 2009-05-22 Soitec Silicon On Insulator MULTILAYER STRUCTURE AND METHOD FOR MANUFACTURING THE SAME

Also Published As

Publication number Publication date
JPS4919028A (en) 1974-02-20

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