JPS51156774U - - Google Patents
Info
- Publication number
- JPS51156774U JPS51156774U JP7776775U JP7776775U JPS51156774U JP S51156774 U JPS51156774 U JP S51156774U JP 7776775 U JP7776775 U JP 7776775U JP 7776775 U JP7776775 U JP 7776775U JP S51156774 U JPS51156774 U JP S51156774U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7776775U JPS5752946Y2 (esLanguage) | 1975-06-09 | 1975-06-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7776775U JPS5752946Y2 (esLanguage) | 1975-06-09 | 1975-06-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS51156774U true JPS51156774U (esLanguage) | 1976-12-14 |
| JPS5752946Y2 JPS5752946Y2 (esLanguage) | 1982-11-17 |
Family
ID=28553995
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7776775U Expired JPS5752946Y2 (esLanguage) | 1975-06-09 | 1975-06-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5752946Y2 (esLanguage) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5543577A (en) * | 1978-09-21 | 1980-03-27 | Canon Inc | Light source device |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3519605B2 (ja) * | 1998-06-19 | 2004-04-19 | 三菱重工業株式会社 | エリプソメトリ装置 |
-
1975
- 1975-06-09 JP JP7776775U patent/JPS5752946Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5543577A (en) * | 1978-09-21 | 1980-03-27 | Canon Inc | Light source device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5752946Y2 (esLanguage) | 1982-11-17 |