JPS51146U - - Google Patents

Info

Publication number
JPS51146U
JPS51146U JP7308674U JP7308674U JPS51146U JP S51146 U JPS51146 U JP S51146U JP 7308674 U JP7308674 U JP 7308674U JP 7308674 U JP7308674 U JP 7308674U JP S51146 U JPS51146 U JP S51146U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7308674U
Other versions
JPS5345097Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7308674U priority Critical patent/JPS5345097Y2/ja
Publication of JPS51146U publication Critical patent/JPS51146U/ja
Application granted granted Critical
Publication of JPS5345097Y2 publication Critical patent/JPS5345097Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP7308674U 1974-06-20 1974-06-20 Expired JPS5345097Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7308674U JPS5345097Y2 (ja) 1974-06-20 1974-06-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7308674U JPS5345097Y2 (ja) 1974-06-20 1974-06-20

Publications (2)

Publication Number Publication Date
JPS51146U true JPS51146U (ja) 1976-01-05
JPS5345097Y2 JPS5345097Y2 (ja) 1978-10-28

Family

ID=28244199

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7308674U Expired JPS5345097Y2 (ja) 1974-06-20 1974-06-20

Country Status (1)

Country Link
JP (1) JPS5345097Y2 (ja)

Also Published As

Publication number Publication date
JPS5345097Y2 (ja) 1978-10-28

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