JPS5114429B2 - - Google Patents
Info
- Publication number
- JPS5114429B2 JPS5114429B2 JP6725771A JP6725771A JPS5114429B2 JP S5114429 B2 JPS5114429 B2 JP S5114429B2 JP 6725771 A JP6725771 A JP 6725771A JP 6725771 A JP6725771 A JP 6725771A JP S5114429 B2 JPS5114429 B2 JP S5114429B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
- Led Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6725771A JPS5114429B2 (it) | 1971-08-31 | 1971-08-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6725771A JPS5114429B2 (it) | 1971-08-31 | 1971-08-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4832470A JPS4832470A (it) | 1973-04-28 |
| JPS5114429B2 true JPS5114429B2 (it) | 1976-05-10 |
Family
ID=13339696
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6725771A Expired JPS5114429B2 (it) | 1971-08-31 | 1971-08-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5114429B2 (it) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS542789B1 (it) * | 1971-07-22 | 1979-02-13 | ||
| JPS5027731A (it) * | 1973-07-13 | 1975-03-22 | ||
| US3865072A (en) * | 1973-10-18 | 1975-02-11 | Hls Ind | Apparatus for chemically depositing epitaxial layers on semiconductor substrates |
| JPS50103273A (it) * | 1974-01-11 | 1975-08-15 | ||
| JPS5835960B2 (ja) * | 1974-06-20 | 1983-08-05 | 日本電気株式会社 | Ｇａａｓ ノ キソウセイチヨウホウホウ |
| US4147571A (en) * | 1977-07-11 | 1979-04-03 | Hewlett-Packard Company | Method for vapor epitaxial deposition of III/V materials utilizing organometallic compounds and a halogen or halide in a hot wall system |
| JPS6254914A (ja) * | 1985-09-04 | 1987-03-10 | Sumitomo Chem Co Ltd | 化合物半導体の気相成長法 |
| JP3155007B2 (ja) * | 1991-07-05 | 2001-04-09 | 三菱化学株式会社 | 化合物半導体とその製造方法 |
| US5827365A (en) * | 1991-07-05 | 1998-10-27 | Mitsubishi Kasei Corporation | Compound semiconductor and its fabrication |
-
1971
- 1971-08-31 JP JP6725771A patent/JPS5114429B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4832470A (it) | 1973-04-28 |