JPS5114427B2 - - Google Patents

Info

Publication number
JPS5114427B2
JPS5114427B2 JP46067449A JP6744971A JPS5114427B2 JP S5114427 B2 JPS5114427 B2 JP S5114427B2 JP 46067449 A JP46067449 A JP 46067449A JP 6744971 A JP6744971 A JP 6744971A JP S5114427 B2 JPS5114427 B2 JP S5114427B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP46067449A
Other languages
Japanese (ja)
Other versions
JPS4833770A (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP46067449A priority Critical patent/JPS5114427B2/ja
Publication of JPS4833770A publication Critical patent/JPS4833770A/ja
Publication of JPS5114427B2 publication Critical patent/JPS5114427B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Sampling And Sample Adjustment (AREA)
JP46067449A 1971-09-03 1971-09-03 Expired JPS5114427B2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP46067449A JPS5114427B2 (enExample) 1971-09-03 1971-09-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP46067449A JPS5114427B2 (enExample) 1971-09-03 1971-09-03

Publications (2)

Publication Number Publication Date
JPS4833770A JPS4833770A (enExample) 1973-05-12
JPS5114427B2 true JPS5114427B2 (enExample) 1976-05-10

Family

ID=13345231

Family Applications (1)

Application Number Title Priority Date Filing Date
JP46067449A Expired JPS5114427B2 (enExample) 1971-09-03 1971-09-03

Country Status (1)

Country Link
JP (1) JPS5114427B2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5233824U (enExample) * 1975-08-31 1977-03-10

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5154653A (en) * 1974-11-07 1976-05-13 Toray Industries Nannenseinosugureta horiamidososeibutsu
JP7703791B2 (ja) * 2022-07-19 2025-07-07 株式会社日立ハイテク 荷電粒子線システム、およびその制御方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5233824U (enExample) * 1975-08-31 1977-03-10

Also Published As

Publication number Publication date
JPS4833770A (enExample) 1973-05-12

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