JPS5114267A - - Google Patents

Info

Publication number
JPS5114267A
JPS5114267A JP49085631A JP8563174A JPS5114267A JP S5114267 A JPS5114267 A JP S5114267A JP 49085631 A JP49085631 A JP 49085631A JP 8563174 A JP8563174 A JP 8563174A JP S5114267 A JPS5114267 A JP S5114267A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP49085631A
Other languages
Japanese (ja)
Other versions
JPS5821424B2 (ja
Inventor
Takeo Yamamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Tungsten Co Ltd
Original Assignee
Tokyo Tungsten Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Tungsten Co Ltd filed Critical Tokyo Tungsten Co Ltd
Priority to JP49085631A priority Critical patent/JPS5821424B2/ja
Publication of JPS5114267A publication Critical patent/JPS5114267A/ja
Publication of JPS5821424B2 publication Critical patent/JPS5821424B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Pressure Welding/Diffusion-Bonding (AREA)
  • Die Bonding (AREA)
JP49085631A 1974-07-27 1974-07-27 半導体材料支持用基板の製造方法 Expired JPS5821424B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP49085631A JPS5821424B2 (ja) 1974-07-27 1974-07-27 半導体材料支持用基板の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP49085631A JPS5821424B2 (ja) 1974-07-27 1974-07-27 半導体材料支持用基板の製造方法

Publications (2)

Publication Number Publication Date
JPS5114267A true JPS5114267A (enExample) 1976-02-04
JPS5821424B2 JPS5821424B2 (ja) 1983-04-30

Family

ID=13864170

Family Applications (1)

Application Number Title Priority Date Filing Date
JP49085631A Expired JPS5821424B2 (ja) 1974-07-27 1974-07-27 半導体材料支持用基板の製造方法

Country Status (1)

Country Link
JP (1) JPS5821424B2 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57165785A (en) * 1981-04-03 1982-10-12 Tokyo Shibaura Electric Co Diverter for nuclear fusion system
JPS61106901U (enExample) * 1984-12-20 1986-07-07

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6057628U (ja) * 1983-09-29 1985-04-22 菊水化学工業株式会社 棟換気構造体

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57165785A (en) * 1981-04-03 1982-10-12 Tokyo Shibaura Electric Co Diverter for nuclear fusion system
JPS61106901U (enExample) * 1984-12-20 1986-07-07

Also Published As

Publication number Publication date
JPS5821424B2 (ja) 1983-04-30

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