JPS51142062U - - Google Patents

Info

Publication number
JPS51142062U
JPS51142062U JP6253875U JP6253875U JPS51142062U JP S51142062 U JPS51142062 U JP S51142062U JP 6253875 U JP6253875 U JP 6253875U JP 6253875 U JP6253875 U JP 6253875U JP S51142062 U JPS51142062 U JP S51142062U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6253875U
Other languages
Japanese (ja)
Other versions
JPS5239099Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6253875U priority Critical patent/JPS5239099Y2/ja
Publication of JPS51142062U publication Critical patent/JPS51142062U/ja
Application granted granted Critical
Publication of JPS5239099Y2 publication Critical patent/JPS5239099Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP6253875U 1975-05-09 1975-05-09 Expired JPS5239099Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6253875U JPS5239099Y2 (enExample) 1975-05-09 1975-05-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6253875U JPS5239099Y2 (enExample) 1975-05-09 1975-05-09

Publications (2)

Publication Number Publication Date
JPS51142062U true JPS51142062U (enExample) 1976-11-16
JPS5239099Y2 JPS5239099Y2 (enExample) 1977-09-05

Family

ID=28525000

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6253875U Expired JPS5239099Y2 (enExample) 1975-05-09 1975-05-09

Country Status (1)

Country Link
JP (1) JPS5239099Y2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS551866A (en) * 1978-06-20 1980-01-09 Fuji Plant Kogyo Kk Method and apparatus for forming uniform film on thin base plate

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS551866A (en) * 1978-06-20 1980-01-09 Fuji Plant Kogyo Kk Method and apparatus for forming uniform film on thin base plate

Also Published As

Publication number Publication date
JPS5239099Y2 (enExample) 1977-09-05

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