JPS51141463U - - Google Patents
Info
- Publication number
- JPS51141463U JPS51141463U JP6063075U JP6063075U JPS51141463U JP S51141463 U JPS51141463 U JP S51141463U JP 6063075 U JP6063075 U JP 6063075U JP 6063075 U JP6063075 U JP 6063075U JP S51141463 U JPS51141463 U JP S51141463U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Cooling Or The Like Of Electrical Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1975060630U JPS5619414Y2 (https=) | 1975-05-07 | 1975-05-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1975060630U JPS5619414Y2 (https=) | 1975-05-07 | 1975-05-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS51141463U true JPS51141463U (https=) | 1976-11-15 |
| JPS5619414Y2 JPS5619414Y2 (https=) | 1981-05-08 |
Family
ID=28521295
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1975060630U Expired JPS5619414Y2 (https=) | 1975-05-07 | 1975-05-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5619414Y2 (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017156465A (ja) * | 2016-02-29 | 2017-09-07 | キヤノン株式会社 | 駆動装置、リソグラフィ装置、冷却方法、および物品の製造方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4959577A (https=) * | 1972-10-05 | 1974-06-10 | ||
| JPS5041158U (https=) * | 1973-08-11 | 1975-04-25 |
-
1975
- 1975-05-07 JP JP1975060630U patent/JPS5619414Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4959577A (https=) * | 1972-10-05 | 1974-06-10 | ||
| JPS5041158U (https=) * | 1973-08-11 | 1975-04-25 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017156465A (ja) * | 2016-02-29 | 2017-09-07 | キヤノン株式会社 | 駆動装置、リソグラフィ装置、冷却方法、および物品の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5619414Y2 (https=) | 1981-05-08 |