JPS51141457U - - Google Patents

Info

Publication number
JPS51141457U
JPS51141457U JP1975061884U JP6188475U JPS51141457U JP S51141457 U JPS51141457 U JP S51141457U JP 1975061884 U JP1975061884 U JP 1975061884U JP 6188475 U JP6188475 U JP 6188475U JP S51141457 U JPS51141457 U JP S51141457U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1975061884U
Other languages
Japanese (ja)
Other versions
JPS5444541Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1975061884U priority Critical patent/JPS5444541Y2/ja
Publication of JPS51141457U publication Critical patent/JPS51141457U/ja
Application granted granted Critical
Publication of JPS5444541Y2 publication Critical patent/JPS5444541Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP1975061884U 1975-05-06 1975-05-06 Expired JPS5444541Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1975061884U JPS5444541Y2 (enExample) 1975-05-06 1975-05-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1975061884U JPS5444541Y2 (enExample) 1975-05-06 1975-05-06

Publications (2)

Publication Number Publication Date
JPS51141457U true JPS51141457U (enExample) 1976-11-15
JPS5444541Y2 JPS5444541Y2 (enExample) 1979-12-21

Family

ID=28523754

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1975061884U Expired JPS5444541Y2 (enExample) 1975-05-06 1975-05-06

Country Status (1)

Country Link
JP (1) JPS5444541Y2 (enExample)

Also Published As

Publication number Publication date
JPS5444541Y2 (enExample) 1979-12-21

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