JPS51140157U - - Google Patents
Info
- Publication number
- JPS51140157U JPS51140157U JP5944275U JP5944275U JPS51140157U JP S51140157 U JPS51140157 U JP S51140157U JP 5944275 U JP5944275 U JP 5944275U JP 5944275 U JP5944275 U JP 5944275U JP S51140157 U JPS51140157 U JP S51140157U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5944275U JPS5441156Y2 (en) | 1975-05-01 | 1975-05-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5944275U JPS5441156Y2 (en) | 1975-05-01 | 1975-05-01 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS51140157U true JPS51140157U (en) | 1976-11-11 |
| JPS5441156Y2 JPS5441156Y2 (en) | 1979-12-03 |
Family
ID=28519047
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5944275U Expired JPS5441156Y2 (en) | 1975-05-01 | 1975-05-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5441156Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57188677A (en) * | 1981-05-14 | 1982-11-19 | Matsushita Electric Ind Co Ltd | Vapor depositing device for metallic thin film |
-
1975
- 1975-05-01 JP JP5944275U patent/JPS5441156Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57188677A (en) * | 1981-05-14 | 1982-11-19 | Matsushita Electric Ind Co Ltd | Vapor depositing device for metallic thin film |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5441156Y2 (en) | 1979-12-03 |