JPS51140156U - - Google Patents
Info
- Publication number
- JPS51140156U JPS51140156U JP5944175U JP5944175U JPS51140156U JP S51140156 U JPS51140156 U JP S51140156U JP 5944175 U JP5944175 U JP 5944175U JP 5944175 U JP5944175 U JP 5944175U JP S51140156 U JPS51140156 U JP S51140156U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5944175U JPS5441155Y2 (en) | 1975-05-01 | 1975-05-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5944175U JPS5441155Y2 (en) | 1975-05-01 | 1975-05-01 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS51140156U true JPS51140156U (en) | 1976-11-11 |
| JPS5441155Y2 JPS5441155Y2 (en) | 1979-12-03 |
Family
ID=28519045
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5944175U Expired JPS5441155Y2 (en) | 1975-05-01 | 1975-05-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5441155Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57188677A (en) * | 1981-05-14 | 1982-11-19 | Matsushita Electric Ind Co Ltd | Vapor depositing device for metallic thin film |
-
1975
- 1975-05-01 JP JP5944175U patent/JPS5441155Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57188677A (en) * | 1981-05-14 | 1982-11-19 | Matsushita Electric Ind Co Ltd | Vapor depositing device for metallic thin film |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5441155Y2 (en) | 1979-12-03 |