JPS51140156U - - Google Patents

Info

Publication number
JPS51140156U
JPS51140156U JP5944175U JP5944175U JPS51140156U JP S51140156 U JPS51140156 U JP S51140156U JP 5944175 U JP5944175 U JP 5944175U JP 5944175 U JP5944175 U JP 5944175U JP S51140156 U JPS51140156 U JP S51140156U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5944175U
Other languages
Japanese (ja)
Other versions
JPS5441155Y2 (cg-RX-API-DMAC10.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5944175U priority Critical patent/JPS5441155Y2/ja
Publication of JPS51140156U publication Critical patent/JPS51140156U/ja
Application granted granted Critical
Publication of JPS5441155Y2 publication Critical patent/JPS5441155Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP5944175U 1975-05-01 1975-05-01 Expired JPS5441155Y2 (cg-RX-API-DMAC10.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5944175U JPS5441155Y2 (cg-RX-API-DMAC10.html) 1975-05-01 1975-05-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5944175U JPS5441155Y2 (cg-RX-API-DMAC10.html) 1975-05-01 1975-05-01

Publications (2)

Publication Number Publication Date
JPS51140156U true JPS51140156U (cg-RX-API-DMAC10.html) 1976-11-11
JPS5441155Y2 JPS5441155Y2 (cg-RX-API-DMAC10.html) 1979-12-03

Family

ID=28519045

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5944175U Expired JPS5441155Y2 (cg-RX-API-DMAC10.html) 1975-05-01 1975-05-01

Country Status (1)

Country Link
JP (1) JPS5441155Y2 (cg-RX-API-DMAC10.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57188677A (en) * 1981-05-14 1982-11-19 Matsushita Electric Ind Co Ltd Vapor depositing device for metallic thin film

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57188677A (en) * 1981-05-14 1982-11-19 Matsushita Electric Ind Co Ltd Vapor depositing device for metallic thin film

Also Published As

Publication number Publication date
JPS5441155Y2 (cg-RX-API-DMAC10.html) 1979-12-03

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