JPS51140052U - - Google Patents
Info
- Publication number
- JPS51140052U JPS51140052U JP6047375U JP6047375U JPS51140052U JP S51140052 U JPS51140052 U JP S51140052U JP 6047375 U JP6047375 U JP 6047375U JP 6047375 U JP6047375 U JP 6047375U JP S51140052 U JPS51140052 U JP S51140052U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6047375U JPS51140052U (show.php) | 1975-05-02 | 1975-05-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6047375U JPS51140052U (show.php) | 1975-05-02 | 1975-05-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS51140052U true JPS51140052U (show.php) | 1976-11-11 |
Family
ID=28520999
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6047375U Pending JPS51140052U (show.php) | 1975-05-02 | 1975-05-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS51140052U (show.php) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6077971A (ja) * | 1983-10-06 | 1985-05-02 | Ulvac Corp | 化学反応を利用した縦型インラインプロセス装置 |
-
1975
- 1975-05-02 JP JP6047375U patent/JPS51140052U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6077971A (ja) * | 1983-10-06 | 1985-05-02 | Ulvac Corp | 化学反応を利用した縦型インラインプロセス装置 |