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Fujitsu Ltd
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Fujitsu Ltd
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Application filed by Fujitsu LtdfiledCriticalFujitsu Ltd
Priority to JP50061838ApriorityCriticalpatent/JPS51138170A/en
Publication of JPS51138170ApublicationCriticalpatent/JPS51138170A/en
PURPOSE: To automate the pattern aligning method by facilitating position aligning by measuring the deviation vector of the moire pattern with the help of the relative position between marker lines and the moire pattern.