JPS51137442U - - Google Patents
Info
- Publication number
- JPS51137442U JPS51137442U JP5818375U JP5818375U JPS51137442U JP S51137442 U JPS51137442 U JP S51137442U JP 5818375 U JP5818375 U JP 5818375U JP 5818375 U JP5818375 U JP 5818375U JP S51137442 U JPS51137442 U JP S51137442U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5818375U JPS51137442U (sv) | 1975-04-28 | 1975-04-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5818375U JPS51137442U (sv) | 1975-04-28 | 1975-04-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS51137442U true JPS51137442U (sv) | 1976-11-06 |
Family
ID=28215271
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5818375U Pending JPS51137442U (sv) | 1975-04-28 | 1975-04-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS51137442U (sv) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0360489A (ja) * | 1989-07-26 | 1991-03-15 | Nkk Corp | 粒状シリコン供給装置 |
| JPH04362088A (ja) * | 1991-06-06 | 1992-12-15 | Nkk Corp | 粒状シリコン供給装置 |
| KR970062082A (ko) * | 1996-02-08 | 1997-09-12 | 와다 다다시 | 입상실리콘 원료의 공급방법과 그 방법에 이용되는 공급관 및 실리콘 단결정의 제조방법 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4827593A (sv) * | 1971-07-17 | 1973-04-11 | ||
| JPS49361U (sv) * | 1972-03-21 | 1974-01-05 |
-
1975
- 1975-04-28 JP JP5818375U patent/JPS51137442U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4827593A (sv) * | 1971-07-17 | 1973-04-11 | ||
| JPS49361U (sv) * | 1972-03-21 | 1974-01-05 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0360489A (ja) * | 1989-07-26 | 1991-03-15 | Nkk Corp | 粒状シリコン供給装置 |
| JPH04362088A (ja) * | 1991-06-06 | 1992-12-15 | Nkk Corp | 粒状シリコン供給装置 |
| KR970062082A (ko) * | 1996-02-08 | 1997-09-12 | 와다 다다시 | 입상실리콘 원료의 공급방법과 그 방법에 이용되는 공급관 및 실리콘 단결정의 제조방법 |