JPS51137379U - - Google Patents

Info

Publication number
JPS51137379U
JPS51137379U JP4892275U JP4892275U JPS51137379U JP S51137379 U JPS51137379 U JP S51137379U JP 4892275 U JP4892275 U JP 4892275U JP 4892275 U JP4892275 U JP 4892275U JP S51137379 U JPS51137379 U JP S51137379U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4892275U
Other languages
Japanese (ja)
Other versions
JPS55941Y2 (xx
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4892275U priority Critical patent/JPS55941Y2/ja
Publication of JPS51137379U publication Critical patent/JPS51137379U/ja
Application granted granted Critical
Publication of JPS55941Y2 publication Critical patent/JPS55941Y2/ja
Expired legal-status Critical Current

Links

JP4892275U 1975-04-11 1975-04-11 Expired JPS55941Y2 (xx)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4892275U JPS55941Y2 (xx) 1975-04-11 1975-04-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4892275U JPS55941Y2 (xx) 1975-04-11 1975-04-11

Publications (2)

Publication Number Publication Date
JPS51137379U true JPS51137379U (xx) 1976-11-05
JPS55941Y2 JPS55941Y2 (xx) 1980-01-11

Family

ID=28189773

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4892275U Expired JPS55941Y2 (xx) 1975-04-11 1975-04-11

Country Status (1)

Country Link
JP (1) JPS55941Y2 (xx)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9337071B2 (en) 1998-07-15 2016-05-10 Rudolph Technologies, Inc. Automated wafer defect inspection system and a process of performing such inspection

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9337071B2 (en) 1998-07-15 2016-05-10 Rudolph Technologies, Inc. Automated wafer defect inspection system and a process of performing such inspection
US9464992B2 (en) 1998-07-15 2016-10-11 Rudolph Technologies, Inc. Automated wafer defect inspection system and a process of performing such inspection

Also Published As

Publication number Publication date
JPS55941Y2 (xx) 1980-01-11

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