JPS51137379U - - Google Patents
Info
- Publication number
- JPS51137379U JPS51137379U JP4892275U JP4892275U JPS51137379U JP S51137379 U JPS51137379 U JP S51137379U JP 4892275 U JP4892275 U JP 4892275U JP 4892275 U JP4892275 U JP 4892275U JP S51137379 U JPS51137379 U JP S51137379U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Measuring Instrument Details And Bridges, And Automatic Balancing Devices (AREA)
- Measurement Of Current Or Voltage (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4892275U JPS55941Y2 (en:Method) | 1975-04-11 | 1975-04-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4892275U JPS55941Y2 (en:Method) | 1975-04-11 | 1975-04-11 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS51137379U true JPS51137379U (en:Method) | 1976-11-05 |
| JPS55941Y2 JPS55941Y2 (en:Method) | 1980-01-11 |
Family
ID=28189773
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4892275U Expired JPS55941Y2 (en:Method) | 1975-04-11 | 1975-04-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS55941Y2 (en:Method) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9337071B2 (en) | 1998-07-15 | 2016-05-10 | Rudolph Technologies, Inc. | Automated wafer defect inspection system and a process of performing such inspection |
-
1975
- 1975-04-11 JP JP4892275U patent/JPS55941Y2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9337071B2 (en) | 1998-07-15 | 2016-05-10 | Rudolph Technologies, Inc. | Automated wafer defect inspection system and a process of performing such inspection |
| US9464992B2 (en) | 1998-07-15 | 2016-10-11 | Rudolph Technologies, Inc. | Automated wafer defect inspection system and a process of performing such inspection |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS55941Y2 (en:Method) | 1980-01-11 |