JPS51137379U - - Google Patents

Info

Publication number
JPS51137379U
JPS51137379U JP4892275U JP4892275U JPS51137379U JP S51137379 U JPS51137379 U JP S51137379U JP 4892275 U JP4892275 U JP 4892275U JP 4892275 U JP4892275 U JP 4892275U JP S51137379 U JPS51137379 U JP S51137379U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4892275U
Other languages
Japanese (ja)
Other versions
JPS55941Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4892275U priority Critical patent/JPS55941Y2/ja
Publication of JPS51137379U publication Critical patent/JPS51137379U/ja
Application granted granted Critical
Publication of JPS55941Y2 publication Critical patent/JPS55941Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Measuring Instrument Details And Bridges, And Automatic Balancing Devices (AREA)
  • Measurement Of Current Or Voltage (AREA)
JP4892275U 1975-04-11 1975-04-11 Expired JPS55941Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4892275U JPS55941Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-04-11 1975-04-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4892275U JPS55941Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-04-11 1975-04-11

Publications (2)

Publication Number Publication Date
JPS51137379U true JPS51137379U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1976-11-05
JPS55941Y2 JPS55941Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1980-01-11

Family

ID=28189773

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4892275U Expired JPS55941Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-04-11 1975-04-11

Country Status (1)

Country Link
JP (1) JPS55941Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9337071B2 (en) 1998-07-15 2016-05-10 Rudolph Technologies, Inc. Automated wafer defect inspection system and a process of performing such inspection

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9337071B2 (en) 1998-07-15 2016-05-10 Rudolph Technologies, Inc. Automated wafer defect inspection system and a process of performing such inspection
US9464992B2 (en) 1998-07-15 2016-10-11 Rudolph Technologies, Inc. Automated wafer defect inspection system and a process of performing such inspection

Also Published As

Publication number Publication date
JPS55941Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1980-01-11

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