JPS51137116U - - Google Patents

Info

Publication number
JPS51137116U
JPS51137116U JP5693175U JP5693175U JPS51137116U JP S51137116 U JPS51137116 U JP S51137116U JP 5693175 U JP5693175 U JP 5693175U JP 5693175 U JP5693175 U JP 5693175U JP S51137116 U JPS51137116 U JP S51137116U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5693175U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5693175U priority Critical patent/JPS51137116U/ja
Publication of JPS51137116U publication Critical patent/JPS51137116U/ja
Pending legal-status Critical Current

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  • Sliding Valves (AREA)
JP5693175U 1975-04-28 1975-04-28 Pending JPS51137116U (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5693175U JPS51137116U (de) 1975-04-28 1975-04-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5693175U JPS51137116U (de) 1975-04-28 1975-04-28

Publications (1)

Publication Number Publication Date
JPS51137116U true JPS51137116U (de) 1976-11-05

Family

ID=28211970

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5693175U Pending JPS51137116U (de) 1975-04-28 1975-04-28

Country Status (1)

Country Link
JP (1) JPS51137116U (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006052846A (ja) * 2004-08-13 2006-02-23 Vat Holding Ag 二つの真空室間に配置される真空バルブの制御方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4912515B1 (de) * 1969-09-16 1974-03-25
JPS4913429B1 (de) * 1969-10-24 1974-03-30

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4912515B1 (de) * 1969-09-16 1974-03-25
JPS4913429B1 (de) * 1969-10-24 1974-03-30

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006052846A (ja) * 2004-08-13 2006-02-23 Vat Holding Ag 二つの真空室間に配置される真空バルブの制御方法

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