JPS51137111A - Ion pump - Google Patents
Ion pumpInfo
- Publication number
- JPS51137111A JPS51137111A JP6096475A JP6096475A JPS51137111A JP S51137111 A JPS51137111 A JP S51137111A JP 6096475 A JP6096475 A JP 6096475A JP 6096475 A JP6096475 A JP 6096475A JP S51137111 A JPS51137111 A JP S51137111A
- Authority
- JP
- Japan
- Prior art keywords
- ion pump
- imtensity
- chieving
- devised
- power
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Tubes For Measurement (AREA)
Abstract
PURPOSE: By the control of both the imtensity of the magnetic field and the voltage of the power to be supplied, it is devised to obtain a stabilized action in the whole pressure field, thus economizing power consumption and chieving long life.
COPYRIGHT: (C)1976,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6096475A JPS51137111A (en) | 1975-05-23 | 1975-05-23 | Ion pump |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6096475A JPS51137111A (en) | 1975-05-23 | 1975-05-23 | Ion pump |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS51137111A true JPS51137111A (en) | 1976-11-26 |
Family
ID=13157593
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6096475A Pending JPS51137111A (en) | 1975-05-23 | 1975-05-23 | Ion pump |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51137111A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6062050A (en) * | 1983-09-16 | 1985-04-10 | Anelva Corp | Sputter ion pump power supply |
-
1975
- 1975-05-23 JP JP6096475A patent/JPS51137111A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6062050A (en) * | 1983-09-16 | 1985-04-10 | Anelva Corp | Sputter ion pump power supply |
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