JPS5113476B2 - - Google Patents

Info

Publication number
JPS5113476B2
JPS5113476B2 JP47015006A JP1500672A JPS5113476B2 JP S5113476 B2 JPS5113476 B2 JP S5113476B2 JP 47015006 A JP47015006 A JP 47015006A JP 1500672 A JP1500672 A JP 1500672A JP S5113476 B2 JPS5113476 B2 JP S5113476B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP47015006A
Other languages
Japanese (ja)
Other versions
JPS4884088A (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP47015006A priority Critical patent/JPS5113476B2/ja
Priority to US331494A priority patent/US3900585A/en
Publication of JPS4884088A publication Critical patent/JPS4884088A/ja
Publication of JPS5113476B2 publication Critical patent/JPS5113476B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP47015006A 1972-02-12 1972-02-12 Expired JPS5113476B2 (https=)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP47015006A JPS5113476B2 (https=) 1972-02-12 1972-02-12
US331494A US3900585A (en) 1972-02-12 1973-02-12 Method for control of ionization electrostatic plating

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47015006A JPS5113476B2 (https=) 1972-02-12 1972-02-12

Publications (2)

Publication Number Publication Date
JPS4884088A JPS4884088A (https=) 1973-11-08
JPS5113476B2 true JPS5113476B2 (https=) 1976-04-28

Family

ID=11876792

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47015006A Expired JPS5113476B2 (https=) 1972-02-12 1972-02-12

Country Status (1)

Country Link
JP (1) JPS5113476B2 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56109231U (https=) * 1980-01-25 1981-08-24

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53153041U (https=) * 1977-05-09 1978-12-01

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56109231U (https=) * 1980-01-25 1981-08-24

Also Published As

Publication number Publication date
JPS4884088A (https=) 1973-11-08

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