JPS51132882A - Suction type leakage tester - Google Patents

Suction type leakage tester

Info

Publication number
JPS51132882A
JPS51132882A JP5601975A JP5601975A JPS51132882A JP S51132882 A JPS51132882 A JP S51132882A JP 5601975 A JP5601975 A JP 5601975A JP 5601975 A JP5601975 A JP 5601975A JP S51132882 A JPS51132882 A JP S51132882A
Authority
JP
Japan
Prior art keywords
suction type
type leakage
leakage tester
flow
tester
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5601975A
Other languages
Japanese (ja)
Inventor
Riichi Fukutome
Ichiro Matsubara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP5601975A priority Critical patent/JPS51132882A/en
Publication of JPS51132882A publication Critical patent/JPS51132882A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To shorten the response time by cousing a flow of viscour flow area which which uses air as the carrier with a vacuum pump in a hollow cable for tracer gas conduction which in connected to a gas detector through a throttle.
COPYRIGHT: (C)1976,JPO&Japio
JP5601975A 1975-05-14 1975-05-14 Suction type leakage tester Pending JPS51132882A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5601975A JPS51132882A (en) 1975-05-14 1975-05-14 Suction type leakage tester

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5601975A JPS51132882A (en) 1975-05-14 1975-05-14 Suction type leakage tester

Publications (1)

Publication Number Publication Date
JPS51132882A true JPS51132882A (en) 1976-11-18

Family

ID=13015340

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5601975A Pending JPS51132882A (en) 1975-05-14 1975-05-14 Suction type leakage tester

Country Status (1)

Country Link
JP (1) JPS51132882A (en)

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