JPS5113248U - - Google Patents
Info
- Publication number
- JPS5113248U JPS5113248U JP8469174U JP8469174U JPS5113248U JP S5113248 U JPS5113248 U JP S5113248U JP 8469174 U JP8469174 U JP 8469174U JP 8469174 U JP8469174 U JP 8469174U JP S5113248 U JPS5113248 U JP S5113248U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8469174U JPS5113248U (zh) | 1974-07-17 | 1974-07-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8469174U JPS5113248U (zh) | 1974-07-17 | 1974-07-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5113248U true JPS5113248U (zh) | 1976-01-30 |
Family
ID=28266078
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8469174U Pending JPS5113248U (zh) | 1974-07-17 | 1974-07-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5113248U (zh) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI621208B (zh) * | 2016-03-14 | 2018-04-11 | Toto Ltd | Electrostatic chuck |
-
1974
- 1974-07-17 JP JP8469174U patent/JPS5113248U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI621208B (zh) * | 2016-03-14 | 2018-04-11 | Toto Ltd | Electrostatic chuck |
| US10923382B2 (en) | 2016-03-14 | 2021-02-16 | Toto Ltd. | Electrostatic chuck |