JPS51131482A - A sputtering apparatus - Google Patents
A sputtering apparatusInfo
- Publication number
- JPS51131482A JPS51131482A JP5565075A JP5565075A JPS51131482A JP S51131482 A JPS51131482 A JP S51131482A JP 5565075 A JP5565075 A JP 5565075A JP 5565075 A JP5565075 A JP 5565075A JP S51131482 A JPS51131482 A JP S51131482A
- Authority
- JP
- Japan
- Prior art keywords
- sputtering apparatus
- sputtering
- plastics
- film
- small
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
PURPOSE: A sputtering apparatus whereby temperature rise is small, film can be formed even on plastics too, power efficiency is high and sputtering speed is high.
COPYRIGHT: (C)1976,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5565075A JPS51131482A (en) | 1975-05-12 | 1975-05-12 | A sputtering apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5565075A JPS51131482A (en) | 1975-05-12 | 1975-05-12 | A sputtering apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS51131482A true JPS51131482A (en) | 1976-11-15 |
Family
ID=13004692
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5565075A Pending JPS51131482A (en) | 1975-05-12 | 1975-05-12 | A sputtering apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51131482A (en) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50109185A (en) * | 1974-01-31 | 1975-08-28 | ||
JPS511381A (en) * | 1974-05-10 | 1976-01-08 | Airco Inc | |
JPS51117933A (en) * | 1975-04-10 | 1976-10-16 | Tokuda Seisakusho | Spattering apparatus |
-
1975
- 1975-05-12 JP JP5565075A patent/JPS51131482A/en active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50109185A (en) * | 1974-01-31 | 1975-08-28 | ||
JPS511381A (en) * | 1974-05-10 | 1976-01-08 | Airco Inc | |
JPS51117933A (en) * | 1975-04-10 | 1976-10-16 | Tokuda Seisakusho | Spattering apparatus |
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