JPS51131482A - A sputtering apparatus - Google Patents

A sputtering apparatus

Info

Publication number
JPS51131482A
JPS51131482A JP5565075A JP5565075A JPS51131482A JP S51131482 A JPS51131482 A JP S51131482A JP 5565075 A JP5565075 A JP 5565075A JP 5565075 A JP5565075 A JP 5565075A JP S51131482 A JPS51131482 A JP S51131482A
Authority
JP
Japan
Prior art keywords
sputtering apparatus
sputtering
plastics
film
small
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5565075A
Other languages
Japanese (ja)
Inventor
Tatsuo Asamaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Anelva Corp
Original Assignee
Anelva Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anelva Corp filed Critical Anelva Corp
Priority to JP5565075A priority Critical patent/JPS51131482A/en
Publication of JPS51131482A publication Critical patent/JPS51131482A/en
Pending legal-status Critical Current

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Abstract

PURPOSE: A sputtering apparatus whereby temperature rise is small, film can be formed even on plastics too, power efficiency is high and sputtering speed is high.
COPYRIGHT: (C)1976,JPO&Japio
JP5565075A 1975-05-12 1975-05-12 A sputtering apparatus Pending JPS51131482A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5565075A JPS51131482A (en) 1975-05-12 1975-05-12 A sputtering apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5565075A JPS51131482A (en) 1975-05-12 1975-05-12 A sputtering apparatus

Publications (1)

Publication Number Publication Date
JPS51131482A true JPS51131482A (en) 1976-11-15

Family

ID=13004692

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5565075A Pending JPS51131482A (en) 1975-05-12 1975-05-12 A sputtering apparatus

Country Status (1)

Country Link
JP (1) JPS51131482A (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50109185A (en) * 1974-01-31 1975-08-28
JPS511381A (en) * 1974-05-10 1976-01-08 Airco Inc
JPS51117933A (en) * 1975-04-10 1976-10-16 Tokuda Seisakusho Spattering apparatus

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50109185A (en) * 1974-01-31 1975-08-28
JPS511381A (en) * 1974-05-10 1976-01-08 Airco Inc
JPS51117933A (en) * 1975-04-10 1976-10-16 Tokuda Seisakusho Spattering apparatus

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