JPS51131267A - The exhaustion system of the electronic microscope - Google Patents
The exhaustion system of the electronic microscopeInfo
- Publication number
- JPS51131267A JPS51131267A JP5638375A JP5638375A JPS51131267A JP S51131267 A JPS51131267 A JP S51131267A JP 5638375 A JP5638375 A JP 5638375A JP 5638375 A JP5638375 A JP 5638375A JP S51131267 A JPS51131267 A JP S51131267A
- Authority
- JP
- Japan
- Prior art keywords
- exhaustion
- electronic microscope
- differential
- exhaustion system
- chambers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5638375A JPS51131267A (en) | 1975-05-10 | 1975-05-10 | The exhaustion system of the electronic microscope |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5638375A JPS51131267A (en) | 1975-05-10 | 1975-05-10 | The exhaustion system of the electronic microscope |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS51131267A true JPS51131267A (en) | 1976-11-15 |
Family
ID=13025722
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5638375A Pending JPS51131267A (en) | 1975-05-10 | 1975-05-10 | The exhaustion system of the electronic microscope |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51131267A (ja) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS544061A (en) * | 1977-06-10 | 1979-01-12 | Hitachi Ltd | Test piece chamber for electronic microscope or the like |
JPH06111745A (ja) * | 1992-09-28 | 1994-04-22 | Toshiba Corp | 電子光学鏡筒および走査電子顕微鏡 |
JP2002358920A (ja) * | 2001-06-01 | 2002-12-13 | Ulvac Japan Ltd | 荷電粒子線装置 |
JP2007019045A (ja) * | 2003-09-10 | 2007-01-25 | Hitachi High-Technologies Corp | 小型電子銃 |
JP2009048799A (ja) * | 2007-08-14 | 2009-03-05 | Jeol Ltd | 荷電粒子線装置 |
JP2009152087A (ja) * | 2007-12-21 | 2009-07-09 | Jeol Ltd | 透過電子顕微鏡 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4852170A (ja) * | 1971-10-29 | 1973-07-21 |
-
1975
- 1975-05-10 JP JP5638375A patent/JPS51131267A/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4852170A (ja) * | 1971-10-29 | 1973-07-21 |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS544061A (en) * | 1977-06-10 | 1979-01-12 | Hitachi Ltd | Test piece chamber for electronic microscope or the like |
JPS583585B2 (ja) * | 1977-06-10 | 1983-01-21 | 株式会社日立製作所 | 電子顕徴鏡等の試料室 |
JPH06111745A (ja) * | 1992-09-28 | 1994-04-22 | Toshiba Corp | 電子光学鏡筒および走査電子顕微鏡 |
JP2002358920A (ja) * | 2001-06-01 | 2002-12-13 | Ulvac Japan Ltd | 荷電粒子線装置 |
JP2007019045A (ja) * | 2003-09-10 | 2007-01-25 | Hitachi High-Technologies Corp | 小型電子銃 |
JP2009048799A (ja) * | 2007-08-14 | 2009-03-05 | Jeol Ltd | 荷電粒子線装置 |
JP2009152087A (ja) * | 2007-12-21 | 2009-07-09 | Jeol Ltd | 透過電子顕微鏡 |
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