JPS5113109B1 - - Google Patents
Info
- Publication number
- JPS5113109B1 JPS5113109B1 JP2886971A JP2886971A JPS5113109B1 JP S5113109 B1 JPS5113109 B1 JP S5113109B1 JP 2886971 A JP2886971 A JP 2886971A JP 2886971 A JP2886971 A JP 2886971A JP S5113109 B1 JPS5113109 B1 JP S5113109B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2886971A JPS5113109B1 (en) | 1971-05-04 | 1971-05-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2886971A JPS5113109B1 (en) | 1971-05-04 | 1971-05-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5113109B1 true JPS5113109B1 (en) | 1976-04-24 |
Family
ID=12260369
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2886971A Pending JPS5113109B1 (en) | 1971-05-04 | 1971-05-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5113109B1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11967512B2 (en) | 2019-09-06 | 2024-04-23 | Kokusai Electric Corporation | Substrate processing apparatus and method of manufacturing semiconductor device |
-
1971
- 1971-05-04 JP JP2886971A patent/JPS5113109B1/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11967512B2 (en) | 2019-09-06 | 2024-04-23 | Kokusai Electric Corporation | Substrate processing apparatus and method of manufacturing semiconductor device |