JPS5113013B2 - - Google Patents

Info

Publication number
JPS5113013B2
JPS5113013B2 JP5347372A JP5347372A JPS5113013B2 JP S5113013 B2 JPS5113013 B2 JP S5113013B2 JP 5347372 A JP5347372 A JP 5347372A JP 5347372 A JP5347372 A JP 5347372A JP S5113013 B2 JPS5113013 B2 JP S5113013B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5347372A
Other languages
Japanese (ja)
Other versions
JPS497254A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5347372A priority Critical patent/JPS5113013B2/ja
Publication of JPS497254A publication Critical patent/JPS497254A/ja
Publication of JPS5113013B2 publication Critical patent/JPS5113013B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
JP5347372A 1972-05-31 1972-05-31 Expired JPS5113013B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5347372A JPS5113013B2 (enrdf_load_stackoverflow) 1972-05-31 1972-05-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5347372A JPS5113013B2 (enrdf_load_stackoverflow) 1972-05-31 1972-05-31

Publications (2)

Publication Number Publication Date
JPS497254A JPS497254A (enrdf_load_stackoverflow) 1974-01-22
JPS5113013B2 true JPS5113013B2 (enrdf_load_stackoverflow) 1976-04-24

Family

ID=12943811

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5347372A Expired JPS5113013B2 (enrdf_load_stackoverflow) 1972-05-31 1972-05-31

Country Status (1)

Country Link
JP (1) JPS5113013B2 (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6429573A (en) * 1987-07-27 1989-01-31 Kajima Corp Self-lifting formwork device
EP0388343B1 (en) * 1989-03-14 1996-07-17 International Business Machines Corporation Chemically amplified photoresist
US5204226A (en) * 1991-03-04 1993-04-20 International Business Machines Corporation Photosensitizers for polysilanes
JP2750310B2 (ja) * 1991-09-17 1998-05-13 インターナショナル・ビジネス・マシーンズ・コーポレイション 近紫外−可視域イメージング用ポジチブフォトレジスト

Also Published As

Publication number Publication date
JPS497254A (enrdf_load_stackoverflow) 1974-01-22

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