JPS5113013B2 - - Google Patents
Info
- Publication number
- JPS5113013B2 JPS5113013B2 JP5347372A JP5347372A JPS5113013B2 JP S5113013 B2 JPS5113013 B2 JP S5113013B2 JP 5347372 A JP5347372 A JP 5347372A JP 5347372 A JP5347372 A JP 5347372A JP S5113013 B2 JPS5113013 B2 JP S5113013B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5347372A JPS5113013B2 (da) | 1972-05-31 | 1972-05-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5347372A JPS5113013B2 (da) | 1972-05-31 | 1972-05-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS497254A JPS497254A (da) | 1974-01-22 |
| JPS5113013B2 true JPS5113013B2 (da) | 1976-04-24 |
Family
ID=12943811
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5347372A Expired JPS5113013B2 (da) | 1972-05-31 | 1972-05-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5113013B2 (da) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6313031B2 (da) * | 1977-02-10 | 1988-03-23 | Copeland Corp |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6429573A (en) * | 1987-07-27 | 1989-01-31 | Kajima Corp | Self-lifting formwork device |
| EP0388343B1 (en) * | 1989-03-14 | 1996-07-17 | International Business Machines Corporation | Chemically amplified photoresist |
| US5204226A (en) * | 1991-03-04 | 1993-04-20 | International Business Machines Corporation | Photosensitizers for polysilanes |
| JP2750310B2 (ja) * | 1991-09-17 | 1998-05-13 | インターナショナル・ビジネス・マシーンズ・コーポレイション | 近紫外−可視域イメージング用ポジチブフォトレジスト |
-
1972
- 1972-05-31 JP JP5347372A patent/JPS5113013B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6313031B2 (da) * | 1977-02-10 | 1988-03-23 | Copeland Corp |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS497254A (da) | 1974-01-22 |