JPS51129279A - Polarizing analyzer - Google Patents
Polarizing analyzerInfo
- Publication number
- JPS51129279A JPS51129279A JP50052539A JP5253975A JPS51129279A JP S51129279 A JPS51129279 A JP S51129279A JP 50052539 A JP50052539 A JP 50052539A JP 5253975 A JP5253975 A JP 5253975A JP S51129279 A JPS51129279 A JP S51129279A
- Authority
- JP
- Japan
- Prior art keywords
- polarizing analyzer
- polarizing
- analyzer
- kdp
- compensating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/21—Polarisation-affecting properties
- G01N21/211—Ellipsometry
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50052539A JPS51129279A (en) | 1975-05-02 | 1975-05-02 | Polarizing analyzer |
US05/679,689 US4105338A (en) | 1975-05-02 | 1976-04-23 | Reflection type ellipsometer for measuring thin film phase difference and thickness |
DE19762618953 DE2618953A1 (de) | 1975-05-02 | 1976-04-29 | Polarimeter |
GB17442/76A GB1551103A (en) | 1975-05-02 | 1976-04-29 | Ellipsometer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50052539A JPS51129279A (en) | 1975-05-02 | 1975-05-02 | Polarizing analyzer |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS51129279A true JPS51129279A (en) | 1976-11-10 |
JPS579012B2 JPS579012B2 (ja) | 1982-02-19 |
Family
ID=12917569
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50052539A Granted JPS51129279A (en) | 1975-05-02 | 1975-05-02 | Polarizing analyzer |
Country Status (4)
Country | Link |
---|---|
US (1) | US4105338A (ja) |
JP (1) | JPS51129279A (ja) |
DE (1) | DE2618953A1 (ja) |
GB (1) | GB1551103A (ja) |
Families Citing this family (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4410277A (en) * | 1978-11-01 | 1983-10-18 | Hitachi, Ltd. | Apparatus for detecting magneto-optical anisotropy |
SE416681B (sv) * | 1979-04-17 | 1981-01-26 | Johan Emanuel Stenberg | Sett att jemfora tva ytors reflexionsegenskaper |
US4456339A (en) * | 1980-06-16 | 1984-06-26 | The United States Of America As Represented By The United States Department Of Energy | Laser heterodyne surface profiler |
DE3419463C1 (de) * | 1984-05-24 | 1985-09-12 | Sagax Instrument AB, Sundbyberg | Vorrichtung zur Erfassung von Stoffeigenschaften von Probenoberflaechen |
US4653924A (en) * | 1984-06-12 | 1987-03-31 | Victor Company Of Japan, Ltd. | Rotating analyzer type ellipsometer |
US4826321A (en) * | 1988-03-14 | 1989-05-02 | Nanometrics, Incorporated | Thin dielectric film measuring system |
US4906844A (en) * | 1988-08-12 | 1990-03-06 | Rockwell International Corporation | Phase sensitive optical monitor for thin film deposition |
DE3830310A1 (de) * | 1988-09-07 | 1990-03-15 | Bodenseewerk Perkin Elmer Co | Polarimeter |
US4866264A (en) * | 1988-10-31 | 1989-09-12 | Northrop Corporation | Method and apparatus for measuring non-reciprocal loss of thin magnetic films and magnetic mirrors |
NL8802920A (nl) * | 1988-11-28 | 1990-06-18 | Hoogovens Groep Bv | Laagdiktemeter. |
FR2657163B1 (fr) * | 1990-01-12 | 1992-05-07 | Bertin & Cie | Capteur de detection et de mesure de l'angle de rotation d'un plan de polarisation de la lumiere. |
US5131752A (en) * | 1990-06-28 | 1992-07-21 | Tamarack Scientific Co., Inc. | Method for film thickness endpoint control |
US5425839A (en) * | 1992-05-14 | 1995-06-20 | Texas Instruments Incorporated | Method for rapidly etching material on a semiconductor device |
EP0737856B1 (en) * | 1995-04-14 | 2010-04-28 | J.A. Woollam Co. Inc. | A method of investigating samples by changing polarisation |
US7193710B1 (en) | 1995-09-20 | 2007-03-20 | J.A. Woollam Co., Inc. | Rotating or rotatable compensator spectroscopic ellipsometer system including multiple element lenses |
US7518725B1 (en) | 1995-09-20 | 2009-04-14 | J.A. Woollam Co., Inc. | Temperature controlled lens |
US7075649B1 (en) | 1995-09-20 | 2006-07-11 | J.A. Woollam Co. | Discrete polarization state rotatable compensator spectroscopic ellipsometer system, and method of calibration |
US7215424B1 (en) | 1998-03-03 | 2007-05-08 | J.A. Woollam Co., Inc. | Broadband ellipsometer or polarimeter system including at least one multiple element lens |
US6256097B1 (en) * | 1999-01-08 | 2001-07-03 | Rudolph Technologies, Inc. | Ellipsometer and ellipsometry method |
US7345762B1 (en) | 2000-05-30 | 2008-03-18 | J.A. Woollam Co., Inc. | Control of beam spot size in ellipsometer and the like systems |
US7535566B1 (en) | 2000-09-05 | 2009-05-19 | J.A. Woollam Co., Inc. | Beam chromatic shifting and directing means |
US6713753B1 (en) | 2001-07-03 | 2004-03-30 | Nanometrics Incorporated | Combination of normal and oblique incidence polarimetry for the characterization of gratings |
US7064828B1 (en) * | 2001-12-19 | 2006-06-20 | Nanometrics Incorporated | Pulsed spectroscopy with spatially variable polarization modulation element |
US7193709B1 (en) | 2003-01-31 | 2007-03-20 | J.A. Woollam Co., Inc. | Ellipsometric investigation of thin films |
US7483148B1 (en) | 2003-01-31 | 2009-01-27 | J. A. Woollam Co., Inc. | Ellipsometric investigation of very thin films |
US7336359B1 (en) | 2004-05-03 | 2008-02-26 | Purdue Research Foundation | System and method for nonlinear optical null ellipsometry |
CN105387937A (zh) * | 2015-11-05 | 2016-03-09 | 黑龙江大学 | 椭圆偏振光检测方法及装置 |
JP7174528B2 (ja) * | 2018-03-30 | 2022-11-17 | Tianma Japan株式会社 | 偏光分析装置及び偏光分析装置の制御方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5246828A (en) * | 1975-10-13 | 1977-04-14 | Seiko Epson Corp | Electrochromic display unit |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR320503A (fr) * | 1902-04-19 | 1902-12-12 | Pellin Philibert | Perfectionnement dans les polarimètres et saccharimètres |
US1978434A (en) * | 1931-06-13 | 1934-10-30 | Harry B Maris | Optical apparatus for measuring the thickness of piezo electric crystals |
US3602597A (en) * | 1969-09-17 | 1971-08-31 | Durrum Instr | Differential circular dichroism measuring apparatus |
-
1975
- 1975-05-02 JP JP50052539A patent/JPS51129279A/ja active Granted
-
1976
- 1976-04-23 US US05/679,689 patent/US4105338A/en not_active Expired - Lifetime
- 1976-04-29 GB GB17442/76A patent/GB1551103A/en not_active Expired
- 1976-04-29 DE DE19762618953 patent/DE2618953A1/de not_active Withdrawn
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5246828A (en) * | 1975-10-13 | 1977-04-14 | Seiko Epson Corp | Electrochromic display unit |
Also Published As
Publication number | Publication date |
---|---|
DE2618953A1 (de) | 1976-11-11 |
JPS579012B2 (ja) | 1982-02-19 |
US4105338A (en) | 1978-08-08 |
GB1551103A (en) | 1979-08-22 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS51129279A (en) | Polarizing analyzer | |
JPS5214277A (en) | Panel positioning apparatus | |
JPS51143344A (en) | Polarizing plate | |
JPS5298418A (en) | 2-value signal converter apparatus for analogue picture signal | |
JPS51139719A (en) | Time axis error correcting device | |
JPS51138399A (en) | Liquid crystal display device | |
JPS51124941A (en) | A device for displaying by liquid crystal | |
JPS51126186A (en) | Stress measurement method using liquid crystal | |
JPS5210481A (en) | A method for preparing yeasts containing glutathione abundantly | |
JPS525684A (en) | Indicator | |
JPS5394814A (en) | Phase variation compensating system | |
JPS5221286A (en) | Liquid crystal composite | |
JPS527483A (en) | Prparation of cholesterol esterase | |
JPS51149886A (en) | Fet type liquid crystal displaying unit | |
JPS5226115A (en) | Profile compensating equipment | |
JPS524295A (en) | Encode method of tickets | |
JPS522540A (en) | Stabilizing method for liquid crystal display | |
JPS5211938A (en) | Prism | |
JPS51142485A (en) | Nematic liquid crystal composition | |
JPS5257155A (en) | Process for preparing cyclic compounds | |
JPS5221287A (en) | Liquid crystal composite | |
JPS5210624A (en) | Index system color tv receiving set | |
JPS5283086A (en) | Production of photoconductor | |
JPS5273756A (en) | Electrochromic display means | |
JPS5282084A (en) | Production of counter elements |