JPS51126864A - Mass flow meter - Google Patents

Mass flow meter

Info

Publication number
JPS51126864A
JPS51126864A JP50051723A JP5172375A JPS51126864A JP S51126864 A JPS51126864 A JP S51126864A JP 50051723 A JP50051723 A JP 50051723A JP 5172375 A JP5172375 A JP 5172375A JP S51126864 A JPS51126864 A JP S51126864A
Authority
JP
Japan
Prior art keywords
mass flow
flow meter
setting
tube path
rings
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50051723A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5751605B2 (enExample
Inventor
Kyoichi Ikeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Hokushin Electric Corp
Yokogawa Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Hokushin Electric Corp, Yokogawa Electric Works Ltd filed Critical Yokogawa Hokushin Electric Corp
Priority to JP50051723A priority Critical patent/JPS51126864A/ja
Publication of JPS51126864A publication Critical patent/JPS51126864A/ja
Publication of JPS5751605B2 publication Critical patent/JPS5751605B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Volume Flow (AREA)
JP50051723A 1975-04-28 1975-04-28 Mass flow meter Granted JPS51126864A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50051723A JPS51126864A (en) 1975-04-28 1975-04-28 Mass flow meter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50051723A JPS51126864A (en) 1975-04-28 1975-04-28 Mass flow meter

Publications (2)

Publication Number Publication Date
JPS51126864A true JPS51126864A (en) 1976-11-05
JPS5751605B2 JPS5751605B2 (enExample) 1982-11-02

Family

ID=12894797

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50051723A Granted JPS51126864A (en) 1975-04-28 1975-04-28 Mass flow meter

Country Status (1)

Country Link
JP (1) JPS51126864A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01282427A (ja) * 1988-05-09 1989-11-14 Nec Corp 流量制御装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS48106761U (enExample) * 1972-03-14 1973-12-11

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS48106761U (enExample) * 1972-03-14 1973-12-11

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01282427A (ja) * 1988-05-09 1989-11-14 Nec Corp 流量制御装置

Also Published As

Publication number Publication date
JPS5751605B2 (enExample) 1982-11-02

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