JPS51126070A - Weber treatment equipment - Google Patents
Weber treatment equipmentInfo
- Publication number
- JPS51126070A JPS51126070A JP4969375A JP4969375A JPS51126070A JP S51126070 A JPS51126070 A JP S51126070A JP 4969375 A JP4969375 A JP 4969375A JP 4969375 A JP4969375 A JP 4969375A JP S51126070 A JPS51126070 A JP S51126070A
- Authority
- JP
- Japan
- Prior art keywords
- weber
- treatment equipment
- treatment
- increase
- treatment liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4969375A JPS51126070A (en) | 1975-04-25 | 1975-04-25 | Weber treatment equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4969375A JPS51126070A (en) | 1975-04-25 | 1975-04-25 | Weber treatment equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS51126070A true JPS51126070A (en) | 1976-11-02 |
JPS5640971B2 JPS5640971B2 (ja) | 1981-09-25 |
Family
ID=12838254
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4969375A Granted JPS51126070A (en) | 1975-04-25 | 1975-04-25 | Weber treatment equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51126070A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03129732A (ja) * | 1989-07-19 | 1991-06-03 | Matsushita Electric Ind Co Ltd | 半導体の処理方法 |
CN102580938A (zh) * | 2011-01-05 | 2012-07-18 | 株式会社迪思科 | 旋转清洗装置 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01179523U (ja) * | 1988-06-08 | 1989-12-22 | ||
JPH0375185U (ja) * | 1989-11-22 | 1991-07-29 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5011386A (ja) * | 1973-05-29 | 1975-02-05 |
-
1975
- 1975-04-25 JP JP4969375A patent/JPS51126070A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5011386A (ja) * | 1973-05-29 | 1975-02-05 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03129732A (ja) * | 1989-07-19 | 1991-06-03 | Matsushita Electric Ind Co Ltd | 半導体の処理方法 |
CN102580938A (zh) * | 2011-01-05 | 2012-07-18 | 株式会社迪思科 | 旋转清洗装置 |
JP2012139660A (ja) * | 2011-01-05 | 2012-07-26 | Disco Corp | スピンナ洗浄装置 |
CN102580938B (zh) * | 2011-01-05 | 2015-04-08 | 株式会社迪思科 | 旋转清洗装置 |
Also Published As
Publication number | Publication date |
---|---|
JPS5640971B2 (ja) | 1981-09-25 |
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