JPS51125154A - A process for preparing polyvinyl alcohol with a limited distribution of molecular weight - Google Patents
A process for preparing polyvinyl alcohol with a limited distribution of molecular weightInfo
- Publication number
- JPS51125154A JPS51125154A JP408375A JP408375A JPS51125154A JP S51125154 A JPS51125154 A JP S51125154A JP 408375 A JP408375 A JP 408375A JP 408375 A JP408375 A JP 408375A JP S51125154 A JPS51125154 A JP S51125154A
- Authority
- JP
- Japan
- Prior art keywords
- molecular weight
- polyvinyl alcohol
- limited distribution
- preparing polyvinyl
- preparing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Processes Of Treating Macromolecular Substances (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
- Compositions Of Macromolecular Compounds (AREA)
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
- Extraction Or Liquid Replacement (AREA)
Abstract
PURPOSE: A process for preparing a polyvinyl alcohol (PVA) suitable for use in negative-working resists with improved resolving power and corrosion resistance,having a limited distribution of molecular weight.
COPYRIGHT: (C)1976,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP408375A JPS51125154A (en) | 1974-12-25 | 1974-12-25 | A process for preparing polyvinyl alcohol with a limited distribution of molecular weight |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP408375A JPS51125154A (en) | 1974-12-25 | 1974-12-25 | A process for preparing polyvinyl alcohol with a limited distribution of molecular weight |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS51125154A true JPS51125154A (en) | 1976-11-01 |
JPS5753815B2 JPS5753815B2 (en) | 1982-11-15 |
Family
ID=11574876
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP408375A Granted JPS51125154A (en) | 1974-12-25 | 1974-12-25 | A process for preparing polyvinyl alcohol with a limited distribution of molecular weight |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51125154A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2004087773A1 (en) * | 2003-03-28 | 2004-10-14 | Az Electronic Materials (Japan) K.K. | Auxiliary for forming fine pattern and process for producing the same |
JP2007206728A (en) * | 2007-04-24 | 2007-08-16 | Az Electronic Materials Kk | Auxiliary agent for forming fine pattern |
-
1974
- 1974-12-25 JP JP408375A patent/JPS51125154A/en active Granted
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2004087773A1 (en) * | 2003-03-28 | 2004-10-14 | Az Electronic Materials (Japan) K.K. | Auxiliary for forming fine pattern and process for producing the same |
JP2004294992A (en) * | 2003-03-28 | 2004-10-21 | Clariant (Japan) Kk | Auxiliary agent for forming fine pattern and its manufacturing method |
CN1328295C (en) * | 2003-03-28 | 2007-07-25 | Az电子材料(日本)株式会社 | Auxiliary for forming fine pattern and process for producing the same |
US7598320B2 (en) | 2003-03-28 | 2009-10-06 | Az Electronic Materials Usa Corp. | Protected polyvinyl alcohol auxiliary for forming fine pattern and process for producing the same |
KR101059378B1 (en) * | 2003-03-28 | 2011-08-26 | 에이제토 엘렉토로닉 마티리알즈 가부시키가이샤 | Fine patterning aid and preparation method thereof |
JP2007206728A (en) * | 2007-04-24 | 2007-08-16 | Az Electronic Materials Kk | Auxiliary agent for forming fine pattern |
JP4610578B2 (en) * | 2007-04-24 | 2011-01-12 | Azエレクトロニックマテリアルズ株式会社 | Fine pattern formation aid |
Also Published As
Publication number | Publication date |
---|---|
JPS5753815B2 (en) | 1982-11-15 |
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