JPS51124938A - Automatic focusing apparatus - Google Patents
Automatic focusing apparatusInfo
- Publication number
- JPS51124938A JPS51124938A JP4966675A JP4966675A JPS51124938A JP S51124938 A JPS51124938 A JP S51124938A JP 4966675 A JP4966675 A JP 4966675A JP 4966675 A JP4966675 A JP 4966675A JP S51124938 A JPS51124938 A JP S51124938A
- Authority
- JP
- Japan
- Prior art keywords
- automatic focusing
- focusing apparatus
- automatic
- pulse motor
- focus exactly
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To focus exactly with the use of pulse motor.
COPYRIGHT: (C)1976,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4966675A JPS51124938A (en) | 1975-04-25 | 1975-04-25 | Automatic focusing apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4966675A JPS51124938A (en) | 1975-04-25 | 1975-04-25 | Automatic focusing apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS51124938A true JPS51124938A (en) | 1976-10-30 |
Family
ID=12837483
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4966675A Pending JPS51124938A (en) | 1975-04-25 | 1975-04-25 | Automatic focusing apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51124938A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5816531A (en) * | 1979-05-11 | 1983-01-31 | アメリカン、セミコンダクター、イクイップメント、テクノロジーズ | Device for positioning semiconductor wafer exposure unit |
-
1975
- 1975-04-25 JP JP4966675A patent/JPS51124938A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5816531A (en) * | 1979-05-11 | 1983-01-31 | アメリカン、セミコンダクター、イクイップメント、テクノロジーズ | Device for positioning semiconductor wafer exposure unit |
JPH0310221B2 (en) * | 1979-05-11 | 1991-02-13 | Amerikan Semikondakutaa Ikuitsupumento Tekunorojiizu |
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