JPS51124938A - Automatic focusing apparatus - Google Patents

Automatic focusing apparatus

Info

Publication number
JPS51124938A
JPS51124938A JP4966675A JP4966675A JPS51124938A JP S51124938 A JPS51124938 A JP S51124938A JP 4966675 A JP4966675 A JP 4966675A JP 4966675 A JP4966675 A JP 4966675A JP S51124938 A JPS51124938 A JP S51124938A
Authority
JP
Japan
Prior art keywords
automatic focusing
focusing apparatus
automatic
pulse motor
focus exactly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4966675A
Other languages
Japanese (ja)
Inventor
Kiyoshi Nakagawa
Hiroyuki Ibe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP4966675A priority Critical patent/JPS51124938A/en
Publication of JPS51124938A publication Critical patent/JPS51124938A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To focus exactly with the use of pulse motor.
COPYRIGHT: (C)1976,JPO&Japio
JP4966675A 1975-04-25 1975-04-25 Automatic focusing apparatus Pending JPS51124938A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4966675A JPS51124938A (en) 1975-04-25 1975-04-25 Automatic focusing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4966675A JPS51124938A (en) 1975-04-25 1975-04-25 Automatic focusing apparatus

Publications (1)

Publication Number Publication Date
JPS51124938A true JPS51124938A (en) 1976-10-30

Family

ID=12837483

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4966675A Pending JPS51124938A (en) 1975-04-25 1975-04-25 Automatic focusing apparatus

Country Status (1)

Country Link
JP (1) JPS51124938A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5816531A (en) * 1979-05-11 1983-01-31 アメリカン、セミコンダクター、イクイップメント、テクノロジーズ Device for positioning semiconductor wafer exposure unit

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5816531A (en) * 1979-05-11 1983-01-31 アメリカン、セミコンダクター、イクイップメント、テクノロジーズ Device for positioning semiconductor wafer exposure unit
JPH0310221B2 (en) * 1979-05-11 1991-02-13 Amerikan Semikondakutaa Ikuitsupumento Tekunorojiizu

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