JPS51124838A - Heating furnace - Google Patents

Heating furnace

Info

Publication number
JPS51124838A
JPS51124838A JP4966875A JP4966875A JPS51124838A JP S51124838 A JPS51124838 A JP S51124838A JP 4966875 A JP4966875 A JP 4966875A JP 4966875 A JP4966875 A JP 4966875A JP S51124838 A JPS51124838 A JP S51124838A
Authority
JP
Japan
Prior art keywords
heating furnace
furnace
pipe
center
equalize
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4966875A
Other languages
Japanese (ja)
Inventor
Ikuo Morii
Masahiko Yasuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP4966875A priority Critical patent/JPS51124838A/en
Publication of JPS51124838A publication Critical patent/JPS51124838A/en
Pending legal-status Critical Current

Links

Landscapes

  • Resistance Heating (AREA)

Abstract

PURPOSE: To equalize the temperature distribution in the direction of upward and downward in a furnace-center-pipe by equalizing a heat distribution which will be applied onto said furnace-center-pipe.
COPYRIGHT: (C)1976,JPO&Japio
JP4966875A 1975-04-25 1975-04-25 Heating furnace Pending JPS51124838A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4966875A JPS51124838A (en) 1975-04-25 1975-04-25 Heating furnace

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4966875A JPS51124838A (en) 1975-04-25 1975-04-25 Heating furnace

Publications (1)

Publication Number Publication Date
JPS51124838A true JPS51124838A (en) 1976-10-30

Family

ID=12837539

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4966875A Pending JPS51124838A (en) 1975-04-25 1975-04-25 Heating furnace

Country Status (1)

Country Link
JP (1) JPS51124838A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63312630A (en) * 1987-06-15 1988-12-21 Toshiba Ceramics Co Ltd Device for heat treatment of semiconductor wafer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63312630A (en) * 1987-06-15 1988-12-21 Toshiba Ceramics Co Ltd Device for heat treatment of semiconductor wafer

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