JPS51124838A - Heating furnace - Google Patents
Heating furnaceInfo
- Publication number
- JPS51124838A JPS51124838A JP4966875A JP4966875A JPS51124838A JP S51124838 A JPS51124838 A JP S51124838A JP 4966875 A JP4966875 A JP 4966875A JP 4966875 A JP4966875 A JP 4966875A JP S51124838 A JPS51124838 A JP S51124838A
- Authority
- JP
- Japan
- Prior art keywords
- heating furnace
- furnace
- pipe
- center
- equalize
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Resistance Heating (AREA)
Abstract
PURPOSE: To equalize the temperature distribution in the direction of upward and downward in a furnace-center-pipe by equalizing a heat distribution which will be applied onto said furnace-center-pipe.
COPYRIGHT: (C)1976,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4966875A JPS51124838A (en) | 1975-04-25 | 1975-04-25 | Heating furnace |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4966875A JPS51124838A (en) | 1975-04-25 | 1975-04-25 | Heating furnace |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS51124838A true JPS51124838A (en) | 1976-10-30 |
Family
ID=12837539
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4966875A Pending JPS51124838A (en) | 1975-04-25 | 1975-04-25 | Heating furnace |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51124838A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63312630A (en) * | 1987-06-15 | 1988-12-21 | Toshiba Ceramics Co Ltd | Device for heat treatment of semiconductor wafer |
-
1975
- 1975-04-25 JP JP4966875A patent/JPS51124838A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63312630A (en) * | 1987-06-15 | 1988-12-21 | Toshiba Ceramics Co Ltd | Device for heat treatment of semiconductor wafer |
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