JPS51123737A - Pattern forming process - Google Patents

Pattern forming process

Info

Publication number
JPS51123737A
JPS51123737A JP4879675A JP4879675A JPS51123737A JP S51123737 A JPS51123737 A JP S51123737A JP 4879675 A JP4879675 A JP 4879675A JP 4879675 A JP4879675 A JP 4879675A JP S51123737 A JPS51123737 A JP S51123737A
Authority
JP
Japan
Prior art keywords
forming process
pattern forming
pattern
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4879675A
Other languages
Japanese (ja)
Inventor
Seitarou Matsuo
Kiichi Takamoto
Akira Ozawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP4879675A priority Critical patent/JPS51123737A/en
Publication of JPS51123737A publication Critical patent/JPS51123737A/en
Pending legal-status Critical Current

Links

Landscapes

  • Photosensitive Polymer And Photoresist Processing (AREA)
  • ing And Chemical Polishing (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP4879675A 1975-04-22 1975-04-22 Pattern forming process Pending JPS51123737A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4879675A JPS51123737A (en) 1975-04-22 1975-04-22 Pattern forming process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4879675A JPS51123737A (en) 1975-04-22 1975-04-22 Pattern forming process

Publications (1)

Publication Number Publication Date
JPS51123737A true JPS51123737A (en) 1976-10-28

Family

ID=12813181

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4879675A Pending JPS51123737A (en) 1975-04-22 1975-04-22 Pattern forming process

Country Status (1)

Country Link
JP (1) JPS51123737A (en)

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