JPS51122158U - - Google Patents
Info
- Publication number
- JPS51122158U JPS51122158U JP4265875U JP4265875U JPS51122158U JP S51122158 U JPS51122158 U JP S51122158U JP 4265875 U JP4265875 U JP 4265875U JP 4265875 U JP4265875 U JP 4265875U JP S51122158 U JPS51122158 U JP S51122158U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4265875U JPS5421563Y2 (en) | 1975-03-29 | 1975-03-29 | |
GB4345975A GB1483966A (en) | 1974-10-23 | 1975-10-22 | Vapourized-metal cluster ion source and ionized-cluster beam deposition |
US05/625,041 US4152478A (en) | 1974-10-23 | 1975-10-23 | Ionized-cluster deposited on a substrate and method of depositing ionized cluster on a substrate |
DE2547552A DE2547552B2 (en) | 1974-10-23 | 1975-10-23 | Layer vapor deposition process and equipment |
US06/011,917 US4217855A (en) | 1974-10-23 | 1979-02-13 | Vaporized-metal cluster ion source and ionized-cluster beam deposition device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4265875U JPS5421563Y2 (en) | 1975-03-29 | 1975-03-29 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS51122158U true JPS51122158U (en) | 1976-10-04 |
JPS5421563Y2 JPS5421563Y2 (en) | 1979-07-31 |
Family
ID=28172324
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4265875U Expired JPS5421563Y2 (en) | 1974-10-23 | 1975-03-29 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5421563Y2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010121215A (en) * | 2010-01-14 | 2010-06-03 | Semiconductor Energy Lab Co Ltd | Deposition apparatus and deposition method |
KR101023006B1 (en) | 2007-11-21 | 2011-03-22 | 미츠비시 쥬고교 가부시키가이샤 | In?line film?formation apparatus |
-
1975
- 1975-03-29 JP JP4265875U patent/JPS5421563Y2/ja not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101023006B1 (en) | 2007-11-21 | 2011-03-22 | 미츠비시 쥬고교 가부시키가이샤 | In?line film?formation apparatus |
JP2010121215A (en) * | 2010-01-14 | 2010-06-03 | Semiconductor Energy Lab Co Ltd | Deposition apparatus and deposition method |
Also Published As
Publication number | Publication date |
---|---|
JPS5421563Y2 (en) | 1979-07-31 |