JPS51119508A - Cryosorption pump - Google Patents

Cryosorption pump

Info

Publication number
JPS51119508A
JPS51119508A JP4435075A JP4435075A JPS51119508A JP S51119508 A JPS51119508 A JP S51119508A JP 4435075 A JP4435075 A JP 4435075A JP 4435075 A JP4435075 A JP 4435075A JP S51119508 A JPS51119508 A JP S51119508A
Authority
JP
Japan
Prior art keywords
cryosorption pump
gas
cryosorption
pump
cryotemperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4435075A
Other languages
English (en)
Japanese (ja)
Other versions
JPS567071B2 (enrdf_load_html_response
Inventor
Chikara Hayashi
Muneharu Komiya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP4435075A priority Critical patent/JPS51119508A/ja
Publication of JPS51119508A publication Critical patent/JPS51119508A/ja
Publication of JPS567071B2 publication Critical patent/JPS567071B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP4435075A 1975-04-14 1975-04-14 Cryosorption pump Granted JPS51119508A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4435075A JPS51119508A (en) 1975-04-14 1975-04-14 Cryosorption pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4435075A JPS51119508A (en) 1975-04-14 1975-04-14 Cryosorption pump

Publications (2)

Publication Number Publication Date
JPS51119508A true JPS51119508A (en) 1976-10-20
JPS567071B2 JPS567071B2 (enrdf_load_html_response) 1981-02-16

Family

ID=12689054

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4435075A Granted JPS51119508A (en) 1975-04-14 1975-04-14 Cryosorption pump

Country Status (1)

Country Link
JP (1) JPS51119508A (enrdf_load_html_response)

Also Published As

Publication number Publication date
JPS567071B2 (enrdf_load_html_response) 1981-02-16

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