JPS51118264A - Device for confirming fixed position of transferred - Google Patents

Device for confirming fixed position of transferred

Info

Publication number
JPS51118264A
JPS51118264A JP4341975A JP4341975A JPS51118264A JP S51118264 A JPS51118264 A JP S51118264A JP 4341975 A JP4341975 A JP 4341975A JP 4341975 A JP4341975 A JP 4341975A JP S51118264 A JPS51118264 A JP S51118264A
Authority
JP
Japan
Prior art keywords
transferred
fixed position
confirming fixed
confirming
center
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4341975A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5710009B2 (enExample
Inventor
Kumakichi Araya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daido Kogyo Co Ltd
Original Assignee
Daido Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daido Kogyo Co Ltd filed Critical Daido Kogyo Co Ltd
Priority to JP4341975A priority Critical patent/JPS51118264A/ja
Publication of JPS51118264A publication Critical patent/JPS51118264A/ja
Publication of JPS5710009B2 publication Critical patent/JPS5710009B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Relays Between Conveyors (AREA)
  • Control Of Conveyors (AREA)
JP4341975A 1975-04-11 1975-04-11 Device for confirming fixed position of transferred Granted JPS51118264A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4341975A JPS51118264A (en) 1975-04-11 1975-04-11 Device for confirming fixed position of transferred

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4341975A JPS51118264A (en) 1975-04-11 1975-04-11 Device for confirming fixed position of transferred

Publications (2)

Publication Number Publication Date
JPS51118264A true JPS51118264A (en) 1976-10-18
JPS5710009B2 JPS5710009B2 (enExample) 1982-02-24

Family

ID=12663177

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4341975A Granted JPS51118264A (en) 1975-04-11 1975-04-11 Device for confirming fixed position of transferred

Country Status (1)

Country Link
JP (1) JPS51118264A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5844721A (ja) * 1982-08-31 1983-03-15 Toshiba Corp 半導体ウエハベ−キング装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5844721A (ja) * 1982-08-31 1983-03-15 Toshiba Corp 半導体ウエハベ−キング装置

Also Published As

Publication number Publication date
JPS5710009B2 (enExample) 1982-02-24

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