JPS5111477B1 - - Google Patents

Info

Publication number
JPS5111477B1
JPS5111477B1 JP2638975A JP2638975A JPS5111477B1 JP S5111477 B1 JPS5111477 B1 JP S5111477B1 JP 2638975 A JP2638975 A JP 2638975A JP 2638975 A JP2638975 A JP 2638975A JP S5111477 B1 JPS5111477 B1 JP S5111477B1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2638975A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2638975A priority Critical patent/JPS5111477B1/ja
Publication of JPS5111477B1 publication Critical patent/JPS5111477B1/ja
Pending legal-status Critical Current

Links

Landscapes

  • Holders For Sensitive Materials And Originals (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • ing And Chemical Polishing (AREA)
JP2638975A 1975-03-04 1975-03-04 Pending JPS5111477B1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2638975A JPS5111477B1 (ja) 1975-03-04 1975-03-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2638975A JPS5111477B1 (ja) 1975-03-04 1975-03-04

Publications (1)

Publication Number Publication Date
JPS5111477B1 true JPS5111477B1 (ja) 1976-04-12

Family

ID=12192167

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2638975A Pending JPS5111477B1 (ja) 1975-03-04 1975-03-04

Country Status (1)

Country Link
JP (1) JPS5111477B1 (ja)

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