JPS51111344A - A method of diffraction grating - Google Patents

A method of diffraction grating

Info

Publication number
JPS51111344A
JPS51111344A JP3557975A JP3557975A JPS51111344A JP S51111344 A JPS51111344 A JP S51111344A JP 3557975 A JP3557975 A JP 3557975A JP 3557975 A JP3557975 A JP 3557975A JP S51111344 A JPS51111344 A JP S51111344A
Authority
JP
Japan
Prior art keywords
diffraction grating
production
good reproducibility
holographic diffraction
grating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3557975A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5513328B2 (index.php
Inventor
Michiharu Nakamura
Kunio Aiki
Shigeo Yamashita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP3557975A priority Critical patent/JPS51111344A/ja
Publication of JPS51111344A publication Critical patent/JPS51111344A/ja
Publication of JPS5513328B2 publication Critical patent/JPS5513328B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Diffracting Gratings Or Hologram Optical Elements (AREA)
JP3557975A 1975-03-26 1975-03-26 A method of diffraction grating Granted JPS51111344A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3557975A JPS51111344A (en) 1975-03-26 1975-03-26 A method of diffraction grating

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3557975A JPS51111344A (en) 1975-03-26 1975-03-26 A method of diffraction grating

Publications (2)

Publication Number Publication Date
JPS51111344A true JPS51111344A (en) 1976-10-01
JPS5513328B2 JPS5513328B2 (index.php) 1980-04-08

Family

ID=12445666

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3557975A Granted JPS51111344A (en) 1975-03-26 1975-03-26 A method of diffraction grating

Country Status (1)

Country Link
JP (1) JPS51111344A (index.php)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2926367A1 (de) 1978-06-30 1980-01-03 Hitachi Ltd Halbleiterlaservorrichtung und verfahren zu ihrer herstellung
JP2014002295A (ja) * 2012-06-20 2014-01-09 Canon Inc 回折格子の製造方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62245070A (ja) * 1986-04-18 1987-10-26 松下冷機株式会社 冷却ユニツト

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2926367A1 (de) 1978-06-30 1980-01-03 Hitachi Ltd Halbleiterlaservorrichtung und verfahren zu ihrer herstellung
JP2014002295A (ja) * 2012-06-20 2014-01-09 Canon Inc 回折格子の製造方法
US9372289B2 (en) 2012-06-20 2016-06-21 Canon Kabushiki Kaisha Method of manufacturing a diffraction grating

Also Published As

Publication number Publication date
JPS5513328B2 (index.php) 1980-04-08

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