JPS51106918U - - Google Patents

Info

Publication number
JPS51106918U
JPS51106918U JP2551375U JP2551375U JPS51106918U JP S51106918 U JPS51106918 U JP S51106918U JP 2551375 U JP2551375 U JP 2551375U JP 2551375 U JP2551375 U JP 2551375U JP S51106918 U JPS51106918 U JP S51106918U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2551375U
Other languages
Japanese (ja)
Other versions
JPS576789Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1975025513U priority Critical patent/JPS576789Y2/ja
Publication of JPS51106918U publication Critical patent/JPS51106918U/ja
Application granted granted Critical
Publication of JPS576789Y2 publication Critical patent/JPS576789Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Rotary Pumps (AREA)
JP1975025513U 1975-02-26 1975-02-26 Expired JPS576789Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1975025513U JPS576789Y2 (enExample) 1975-02-26 1975-02-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1975025513U JPS576789Y2 (enExample) 1975-02-26 1975-02-26

Publications (2)

Publication Number Publication Date
JPS51106918U true JPS51106918U (enExample) 1976-08-26
JPS576789Y2 JPS576789Y2 (enExample) 1982-02-08

Family

ID=28124165

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1975025513U Expired JPS576789Y2 (enExample) 1975-02-26 1975-02-26

Country Status (1)

Country Link
JP (1) JPS576789Y2 (enExample)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6293490A (ja) * 1985-10-21 1987-04-28 Hitachi Ltd スクリユ−真空ポンプ
JPS63109292A (ja) * 1986-10-27 1988-05-13 Hitachi Ltd 半導体製造装置用スクリュー真空ポンプ
JP2010019170A (ja) * 2008-07-10 2010-01-28 Kobe Steel Ltd スクリュ圧縮機
WO2016157449A1 (ja) * 2015-03-31 2016-10-06 株式会社日立産機システム ガス圧縮機
WO2021071910A1 (en) * 2019-10-07 2021-04-15 Carrier Corporation Screw compressor with adjustable passage

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4930167A (enExample) * 1972-08-03 1974-03-18

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4930167A (enExample) * 1972-08-03 1974-03-18

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6293490A (ja) * 1985-10-21 1987-04-28 Hitachi Ltd スクリユ−真空ポンプ
JPS63109292A (ja) * 1986-10-27 1988-05-13 Hitachi Ltd 半導体製造装置用スクリュー真空ポンプ
JP2010019170A (ja) * 2008-07-10 2010-01-28 Kobe Steel Ltd スクリュ圧縮機
WO2016157449A1 (ja) * 2015-03-31 2016-10-06 株式会社日立産機システム ガス圧縮機
WO2021071910A1 (en) * 2019-10-07 2021-04-15 Carrier Corporation Screw compressor with adjustable passage
CN114555947A (zh) * 2019-10-07 2022-05-27 开利公司 具有可调整通道的螺杆压缩机

Also Published As

Publication number Publication date
JPS576789Y2 (enExample) 1982-02-08

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