JPS51106918U - - Google Patents
Info
- Publication number
- JPS51106918U JPS51106918U JP2551375U JP2551375U JPS51106918U JP S51106918 U JPS51106918 U JP S51106918U JP 2551375 U JP2551375 U JP 2551375U JP 2551375 U JP2551375 U JP 2551375U JP S51106918 U JPS51106918 U JP S51106918U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Rotary Pumps (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1975025513U JPS576789Y2 (en:Method) | 1975-02-26 | 1975-02-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1975025513U JPS576789Y2 (en:Method) | 1975-02-26 | 1975-02-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS51106918U true JPS51106918U (en:Method) | 1976-08-26 |
| JPS576789Y2 JPS576789Y2 (en:Method) | 1982-02-08 |
Family
ID=28124165
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1975025513U Expired JPS576789Y2 (en:Method) | 1975-02-26 | 1975-02-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS576789Y2 (en:Method) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6293490A (ja) * | 1985-10-21 | 1987-04-28 | Hitachi Ltd | スクリユ−真空ポンプ |
| JPS63109292A (ja) * | 1986-10-27 | 1988-05-13 | Hitachi Ltd | 半導体製造装置用スクリュー真空ポンプ |
| JP2010019170A (ja) * | 2008-07-10 | 2010-01-28 | Kobe Steel Ltd | スクリュ圧縮機 |
| WO2016157449A1 (ja) * | 2015-03-31 | 2016-10-06 | 株式会社日立産機システム | ガス圧縮機 |
| WO2021071910A1 (en) * | 2019-10-07 | 2021-04-15 | Carrier Corporation | Screw compressor with adjustable passage |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4930167A (en:Method) * | 1972-08-03 | 1974-03-18 |
-
1975
- 1975-02-26 JP JP1975025513U patent/JPS576789Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4930167A (en:Method) * | 1972-08-03 | 1974-03-18 |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6293490A (ja) * | 1985-10-21 | 1987-04-28 | Hitachi Ltd | スクリユ−真空ポンプ |
| JPS63109292A (ja) * | 1986-10-27 | 1988-05-13 | Hitachi Ltd | 半導体製造装置用スクリュー真空ポンプ |
| JP2010019170A (ja) * | 2008-07-10 | 2010-01-28 | Kobe Steel Ltd | スクリュ圧縮機 |
| WO2016157449A1 (ja) * | 2015-03-31 | 2016-10-06 | 株式会社日立産機システム | ガス圧縮機 |
| WO2021071910A1 (en) * | 2019-10-07 | 2021-04-15 | Carrier Corporation | Screw compressor with adjustable passage |
| CN114555947A (zh) * | 2019-10-07 | 2022-05-27 | 开利公司 | 具有可调整通道的螺杆压缩机 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS576789Y2 (en:Method) | 1982-02-08 |