JPS51103037A - Shimajokozohyomenbuzainoseizoho - Google Patents

Shimajokozohyomenbuzainoseizoho

Info

Publication number
JPS51103037A
JPS51103037A JP2704975A JP2704975A JPS51103037A JP S51103037 A JPS51103037 A JP S51103037A JP 2704975 A JP2704975 A JP 2704975A JP 2704975 A JP2704975 A JP 2704975A JP S51103037 A JPS51103037 A JP S51103037A
Authority
JP
Japan
Prior art keywords
shimajokozohyomenbuzainoseizoho
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2704975A
Other languages
English (en)
Other versions
JPS5756551B2 (ja
Inventor
Chikara Hayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Nihon Shinku Gijutsu KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc, Nihon Shinku Gijutsu KK filed Critical Ulvac Inc
Priority to JP2704975A priority Critical patent/JPS51103037A/ja
Publication of JPS51103037A publication Critical patent/JPS51103037A/ja
Publication of JPS5756551B2 publication Critical patent/JPS5756551B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP2704975A 1975-03-07 1975-03-07 Shimajokozohyomenbuzainoseizoho Granted JPS51103037A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2704975A JPS51103037A (ja) 1975-03-07 1975-03-07 Shimajokozohyomenbuzainoseizoho

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2704975A JPS51103037A (ja) 1975-03-07 1975-03-07 Shimajokozohyomenbuzainoseizoho

Publications (2)

Publication Number Publication Date
JPS51103037A true JPS51103037A (ja) 1976-09-11
JPS5756551B2 JPS5756551B2 (ja) 1982-11-30

Family

ID=12210205

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2704975A Granted JPS51103037A (ja) 1975-03-07 1975-03-07 Shimajokozohyomenbuzainoseizoho

Country Status (1)

Country Link
JP (1) JPS51103037A (ja)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4910897A (ja) * 1972-05-11 1974-01-30

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4910897A (ja) * 1972-05-11 1974-01-30

Also Published As

Publication number Publication date
JPS5756551B2 (ja) 1982-11-30

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