JPS509972A - - Google Patents
Info
- Publication number
- JPS509972A JPS509972A JP48062002A JP6200273A JPS509972A JP S509972 A JPS509972 A JP S509972A JP 48062002 A JP48062002 A JP 48062002A JP 6200273 A JP6200273 A JP 6200273A JP S509972 A JPS509972 A JP S509972A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Cleaning In General (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP48062002A JPS509972A (ja) | 1973-06-04 | 1973-06-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP48062002A JPS509972A (ja) | 1973-06-04 | 1973-06-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS509972A true JPS509972A (ja) | 1975-01-31 |
Family
ID=13187499
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP48062002A Pending JPS509972A (ja) | 1973-06-04 | 1973-06-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS509972A (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101829660A (zh) * | 2009-03-09 | 2010-09-15 | 株式会社长冈制作所 | 基板输送装置 |
-
1973
- 1973-06-04 JP JP48062002A patent/JPS509972A/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101829660A (zh) * | 2009-03-09 | 2010-09-15 | 株式会社长冈制作所 | 基板输送装置 |
| JP2010207687A (ja) * | 2009-03-09 | 2010-09-24 | Nagaoka Seisakusho:Kk | 基板搬送装置 |