JPS5099677A - - Google Patents

Info

Publication number
JPS5099677A
JPS5099677A JP5169574A JP5169574A JPS5099677A JP S5099677 A JPS5099677 A JP S5099677A JP 5169574 A JP5169574 A JP 5169574A JP 5169574 A JP5169574 A JP 5169574A JP S5099677 A JPS5099677 A JP S5099677A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5169574A
Other languages
Japanese (ja)
Other versions
JPS5530656B2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS5099677A publication Critical patent/JPS5099677A/ja
Publication of JPS5530656B2 publication Critical patent/JPS5530656B2/ja
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/02Electrodes; Screens; Mounting, supporting, spacing or insulating thereof
    • H01J29/10Screens on or from which an image or pattern is formed, picked up, converted or stored
    • H01J29/36Photoelectric screens; Charge-storage screens
    • H01J29/39Charge-storage screens
JP5169574A 1974-01-02 1974-05-09 Expired JPS5530656B2 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US43025774A 1974-01-02 1974-01-02

Publications (2)

Publication Number Publication Date
JPS5099677A true JPS5099677A (en) 1975-08-07
JPS5530656B2 JPS5530656B2 (en) 1980-08-12

Family

ID=23706754

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5169574A Expired JPS5530656B2 (en) 1974-01-02 1974-05-09

Country Status (7)

Country Link
JP (1) JPS5530656B2 (en)
CA (1) CA1044744A (en)
DE (1) DE2420789C3 (en)
FR (1) FR2256529B1 (en)
GB (1) GB1478594A (en)
IT (1) IT1021128B (en)
NL (1) NL7407172A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6831784B2 (en) * 2014-12-01 2021-02-17 エーエスエムエル ネザーランズ ビー.ブイ. A lithographic processing system that includes methods and equipment for obtaining diagnostic information about the lithography manufacturing process, diagnostic equipment.

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4849378A (en) * 1971-10-22 1973-07-12
JPS49118366A (en) * 1973-03-10 1974-11-12

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4849378A (en) * 1971-10-22 1973-07-12
JPS49118366A (en) * 1973-03-10 1974-11-12

Also Published As

Publication number Publication date
IT1021128B (en) 1978-01-30
FR2256529A1 (en) 1975-07-25
JPS5530656B2 (en) 1980-08-12
GB1478594A (en) 1977-07-06
DE2420789C3 (en) 1980-08-21
NL7407172A (en) 1975-07-04
DE2420789A1 (en) 1975-07-10
DE2420789B2 (en) 1979-12-06
FR2256529B1 (en) 1979-01-26
CA1044744A (en) 1978-12-19

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