JPS5099360A - - Google Patents
Info
- Publication number
- JPS5099360A JPS5099360A JP136574A JP136574A JPS5099360A JP S5099360 A JPS5099360 A JP S5099360A JP 136574 A JP136574 A JP 136574A JP 136574 A JP136574 A JP 136574A JP S5099360 A JPS5099360 A JP S5099360A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP741365A JPS5830522B2 (ja) | 1973-12-28 | 1973-12-28 | ガイケイケンサソウチ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP741365A JPS5830522B2 (ja) | 1973-12-28 | 1973-12-28 | ガイケイケンサソウチ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5099360A true JPS5099360A (ja) | 1975-08-07 |
| JPS5830522B2 JPS5830522B2 (ja) | 1983-06-29 |
Family
ID=11499457
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP741365A Expired JPS5830522B2 (ja) | 1973-12-28 | 1973-12-28 | ガイケイケンサソウチ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5830522B2 (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014145660A (ja) * | 2013-01-29 | 2014-08-14 | Mecc Co Ltd | 欠陥検査装置、及び欠陥検査方法 |
-
1973
- 1973-12-28 JP JP741365A patent/JPS5830522B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014145660A (ja) * | 2013-01-29 | 2014-08-14 | Mecc Co Ltd | 欠陥検査装置、及び欠陥検査方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5830522B2 (ja) | 1983-06-29 |