JPS5099264A - - Google Patents
Info
- Publication number
- JPS5099264A JPS5099264A JP49148247A JP14824774A JPS5099264A JP S5099264 A JPS5099264 A JP S5099264A JP 49148247 A JP49148247 A JP 49148247A JP 14824774 A JP14824774 A JP 14824774A JP S5099264 A JPS5099264 A JP S5099264A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Details Of Measuring And Other Instruments (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB5985073 | 1973-12-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5099264A true JPS5099264A (ja) | 1975-08-06 |
Family
ID=10484520
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP49148247A Pending JPS5099264A (ja) | 1973-12-27 | 1974-12-25 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JPS5099264A (ja) |
| DE (1) | DE2457401A1 (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61273841A (ja) * | 1985-05-28 | 1986-12-04 | Agency Of Ind Science & Technol | 機構学上自由度のない積上形二次元微動載物台 |
-
1974
- 1974-12-05 DE DE19742457401 patent/DE2457401A1/de active Pending
- 1974-12-25 JP JP49148247A patent/JPS5099264A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61273841A (ja) * | 1985-05-28 | 1986-12-04 | Agency Of Ind Science & Technol | 機構学上自由度のない積上形二次元微動載物台 |
Also Published As
| Publication number | Publication date |
|---|---|
| DE2457401A1 (de) | 1975-07-10 |