JPS5096298A - - Google Patents
Info
- Publication number
- JPS5096298A JPS5096298A JP48143473A JP14347373A JPS5096298A JP S5096298 A JPS5096298 A JP S5096298A JP 48143473 A JP48143473 A JP 48143473A JP 14347373 A JP14347373 A JP 14347373A JP S5096298 A JPS5096298 A JP S5096298A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14347373A JPS5718137B2 (ja) | 1973-12-24 | 1973-12-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14347373A JPS5718137B2 (ja) | 1973-12-24 | 1973-12-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5096298A true JPS5096298A (ja) | 1975-07-31 |
| JPS5718137B2 JPS5718137B2 (ja) | 1982-04-15 |
Family
ID=15339503
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14347373A Expired JPS5718137B2 (ja) | 1973-12-24 | 1973-12-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5718137B2 (ja) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60121654A (ja) * | 1983-12-02 | 1985-06-29 | Hitachi Ltd | イオンビーム装置 |
| JPS62213054A (ja) * | 1986-03-14 | 1987-09-18 | Res Dev Corp Of Japan | 走査型電子顕微鏡による表面粗さ測定装置 |
-
1973
- 1973-12-24 JP JP14347373A patent/JPS5718137B2/ja not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60121654A (ja) * | 1983-12-02 | 1985-06-29 | Hitachi Ltd | イオンビーム装置 |
| JPH0588502B2 (ja) * | 1983-12-02 | 1993-12-22 | Hitachi Ltd | |
| JPS62213054A (ja) * | 1986-03-14 | 1987-09-18 | Res Dev Corp Of Japan | 走査型電子顕微鏡による表面粗さ測定装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5718137B2 (ja) | 1982-04-15 |